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Integrated MEMS Technologies

Published online by Cambridge University Press:  31 January 2011

Andrea E. Franke ,
Tsu-Jae King  and
Roger T. Howe
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While microelectromechanical systems (MEMS) technology has made a substantial impact over the past decade at the device or component level, it has yet to realize the “S” in its acronym, as complex microsystems consisting of sensors and actuators integrated with sense, control, and signal-processing electronics are still beyond the current state of the art. There are several incentives to co-fabricate MEMS devices and electronics on a single silicon chip, which apply to applications such as inertial sensors.

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Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 291 - 295
Copyright
Copyright © Materials Research Society 2001

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