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Silicon Nitride Membrane Dynamic Masking Allows Improved Shapes of Near-Field Optical Apertures Fabricated by FIB

Published online by Cambridge University Press:  31 January 2011

Joan J. Carvajal

Abstract

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Type
Research/Researchers
Information
MRS Bulletin , Volume 34 , Issue 1: Materials Challenges for Advanced Nuclear Energy Systems , January 2009 , pp. 5 - 6
Copyright
Copyright © Materials Research Society 2009