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The DMDTM Projection Display Chip: A MEMS-Based Technology

Abstract

The possibility of an all-digital (sourceto-eye) projection display was realized in 1987 with the invention of the Digital Micromirror Device™ projection display chip at Texas Instruments (TI). The DMD™ chip is a microelectromechanical systems (MEMS) array of fast digital micromirrors, monolithically integrated onto and controlled by an underlying silicon memory chip. Digital Light Processing™ projection displays are based on the DMD chip. DLP™ projection displays present bright, seamless images to the eye that have high image fidelity, and stability.

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3P.F. van Kessel , L.J. Hornbeck , R.E. Meier , and M.R. Douglass , in Proc. IEEE 86 (1998) p.1687. Good review of DMD operation, micro-mirror dynamics, manufacturing, reliability, optical system design, and system electronics.

4M.R. Douglass , in Proc. 1998 IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1998) p.9.

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MRS Bulletin
  • ISSN: 0883-7694
  • EISSN: 1938-1425
  • URL: /core/journals/mrs-bulletin
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