Skip to main content
    • Aa
    • Aa
  • Get access
    Check if you have access via personal or institutional login
  • Cited by 48
  • Cited by
    This article has been cited by the following publications. This list is generated based on data provided by CrossRef.

    Hall, Simon R. G. Cashmore, Matt Blackburn, John Koutsourakis, George and Gottschalg, Ralph 2016. Compressive Current Response Mapping of Photovoltaic Devices Using MEMS Mirror Arrays. IEEE Transactions on Instrumentation and Measurement, Vol. 65, Issue. 8, p. 1945.

    Hu, Y. M. Zhu, Y. Zhou, W. Wang, H. Yi, J. H. Xin, S. S. He, W. J. and Shen, T. 2016. Dip-coating for dodecylphosphonic acid derivatization on aluminum surfaces: an easy approach to superhydrophobicity. Journal of Coatings Technology and Research, Vol. 13, Issue. 1, p. 115.

    Qi, C. Zheng, Y. Cao, L. Gao, J. and Wan, Y. 2016. Preparation and performance of sol–gel-derived alumina film modified by stearic acid. Journal of Sol-Gel Science and Technology, Vol. 78, Issue. 3, p. 641.

    Qu, Hongwei 2016. CMOS MEMS Fabrication Technologies and Devices. Micromachines, Vol. 7, Issue. 2, p. 14.

    Zhu, Y. Hu, Y. M. Nie, H.-Y. Zhou, W. and Yi, J. H. 2016. Superhydrophobicity via organophosphonic acid derivatised aluminium films. Surface Engineering, Vol. 32, Issue. 2, p. 114.

    Holmstrom, Sven T. S. Baran, Utku and Urey, Hakan 2014. MEMS Laser Scanners: A Review. Journal of Microelectromechanical Systems, Vol. 23, Issue. 2, p. 259.

    Song, In-Hyouk Forfang, William B D Cole, Bryan and Hee You, Byoung 2014. Characterization of a vertically movable gate field effect transistor using a silicon-on-insulator wafer. Journal of Micromechanics and Microengineering, Vol. 24, Issue. 10, p. 105002.

    Liu, Zhao Jun Chong, Wing Cheung Wong, Ka Ming Tam, Ka Ho and Lau, Kei May 2013. A Novel BLU-Free Full-Color LED Projector Using LED on Silicon Micro-Displays. IEEE Photonics Technology Letters, Vol. 25, Issue. 23, p. 2267.

    Zhang, Quan Wan, Yong Li, Yang Yang, Shuyan and Yao, Wenqing 2013. Friction reducing behavior of stearic acid film on a textured aluminum substrate. Applied Surface Science, Vol. 280, p. 545.

    2013. Principles and Applications to Tribology.

    2013. Introduction to Tribology.

    Schlick, Christopher Winkelholz, Carsten Ziefle, Martina and Mertens, Alexander 2012. Human–Computer Interaction Handbook.

    Morton, Beau D. Wang, Hengyu Fleming, Robert A. and Zou, Min 2011. Nanoscale Surface Engineering with Deformation-Resistant Core–Shell Nanostructures. Tribology Letters, Vol. 42, Issue. 1, p. 51.

    Randhawa, Jatinder S. Laflin, Kate E. Seelam, Natasha and Gracias, David H. 2011. Microchemomechanical Systems. Advanced Functional Materials, Vol. 21, Issue. 13, p. 2395.

    Vodnick, Aaron M. and Baker, Shefford P. 2011. Strain transfer and inhomogeneous deformation in passivated thin films with mixed texture. Acta Materialia, Vol. 59, Issue. 14, p. 5681.

    Miller, Brendan P. Theodore, Nimel D. Brukman, Matthew J. Wahl, Kathryn J. and Krim, Jacqueline 2010. A Nano- to Macroscale Tribological Study of PFTS and TCP Lubricants for Si MEMS Applications. Tribology Letters, Vol. 38, Issue. 1, p. 69.

    Solgaard, Olav 2010. Miniaturization of free space optical systems. Applied Optics, Vol. 49, Issue. 25, p. F18.

    Chen, Kuan-Lin Melamud, Renata Wang, Shasha and Kenny, Thomas W. 2009. 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems. p. 1071.

    Bhushan, B. 2008. Nanotribology and nanomechanics in nano/biotechnology. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 366, Issue. 1870, p. 1499.

    DeRose, J.A. Hoque, E. Bhushan, B. and Mathieu, H.J. 2008. Characterization of perfluorodecanoate self-assembled monolayers on aluminum and comparison of stability with phosphonate and siloxy self-assembled monolayers. Surface Science, Vol. 602, Issue. 7, p. 1360.


The DMDTM Projection Display Chip: A MEMS-Based Technology


The possibility of an all-digital (sourceto-eye) projection display was realized in 1987 with the invention of the Digital Micromirror Device™ projection display chip at Texas Instruments (TI). The DMD™ chip is a microelectromechanical systems (MEMS) array of fast digital micromirrors, monolithically integrated onto and controlled by an underlying silicon memory chip. Digital Light Processing™ projection displays are based on the DMD chip. DLP™ projection displays present bright, seamless images to the eye that have high image fidelity, and stability.

Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

3P.F. van Kessel , L.J. Hornbeck , R.E. Meier , and M.R. Douglass , in Proc. IEEE 86 (1998) p.1687. Good review of DMD operation, micro-mirror dynamics, manufacturing, reliability, optical system design, and system electronics.

4M.R. Douglass , in Proc. 1998 IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1998) p.9.

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Bulletin
  • ISSN: 0883-7694
  • EISSN: 1938-1425
  • URL: /core/journals/mrs-bulletin
Please enter your name
Please enter a valid email address
Who would you like to send this to? *