Skip to main content
×
Home
    • Aa
    • Aa

Thin films and microelectrode arrays for neuroprosthetics

  • Juan Ordonez (a1), Martin Schuettler (a2), Christian Boehler (a3), Tim Boretius (a4) and Thomas Stieglitz (a5)...
Abstract
Abstract

Complex prosthetic limbs, the bionic eye, or brain-computer interfaces implement microelectrode arrays to connect the nervous system to an electronic device. The aim is to partly restore lost body functions or to gather bioelectrical activity from the nervous system. Microelectrode arrays are fabricated to have specific electrical and mechanical properties to match the biological requirements of the intended application. Polyimide and parylene-C are favorable polymers for substrate and insulation layers in thin-film applications. This article reviews the materials and the mechanical and electrical properties of electrode arrays. It emphasizes the often ignored but crucial influence of adhesion of the thin-film layers on the device’s longevity and reliability. Adhesion promotion techniques using layers of silicon carbide (SiC) are also discussed. Even though the main focus is on thin-film devices fabricated using traditional methods of micromachining based on lithography, an alternative to thin films, laser-patterned silicone/metal foil microelectrode arrays, is also presented. Characterization as well as application examples of these devices are also presented.

Copyright
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

1. H. Kern , C. Hofer , M. Mödlin , C. Forstner , D. Raschka-Högler , W. Mayr , H. Stöhr , Artif. Organs 26, 216 (2002).

2. G.S. Brindley , Paraplegia 33, 5 (1995).

4. P.N. Taylor , J.H. Burridge , A.L. Dunkerley , D.E. Wood , J.A. Norton , C. Singleton , Arch. Phys. Med. Rehabil. 80, 1577 (1999).

5. J.H. Burridge , M. Haugland , B. Larsen , N. Svaneborg , H.K. Iversen , P.B. Christensen , R.M. Pickering , T. Sinkjaer , J. Rehabil. Med. 40, 873 (2008).

6. J.H. Burridge , T. Sinkjaer , B. Larsen , M. Haugland , R.M. Pickering , J. Rehabil. Med. 39, 212 (2007).

7. G. Clark , Cochlear Implants—Fundamentals and Applications (Springer, NY, 2003).

8. T. Stieglitz , J. Neural Eng. 6 (065005) (2009).

9. S. Kelly , D.B. Shire , J. Chen , P. Doyle , M.D. Gingerich , W.A. Drohan , L.S. Theogarajan , S.F. Cogan , J.L. Wyatt , J.F. Rizzo III, 2nd International Symposium on Applied Sciences in Biomedical and Communication Technologies (2009), pp. 16.

10. E.M. Maynard , Annu. Rev. Biomed. Eng. 3, 145 (2001).

11. G.J. Suaning , N.H. Lovell , K. Schindhelm , M.T. Coroneo , Aust. New Zeal. J. Ophthalmol. 26, 195 (1998).

12. J. Weiland , IEEE Eng. Med. Biol. Mag. 25, 60 (2006).

15. G.C. Albert , C.M. Cook , F.S. Prato , A.W. Thomas , Neurosci. Biobehav. Rev. 33, 1042 (2009).

16. D.A. Groves , V.J. Brown , Neurosci. Biobehav. Rev. 29, 493 (2005).

18. A.P. Amar , Expert Rev. Neurother. 7, 1763 (2007).

20. P.G. Patil D.A. Turner , Neurotherapeutics 5, 137 (2008).

21. C. Toledo , L. Leija , R. Munoz , A. Vera , A. Ramirez , Pan American Health Care Exchanges PAHCE 2009 (2009), pp. 104108.

22. J.P. Donoghue , Nat. Neurosci. 5, 1085 (2002).

23. T. Stieglitz , B. Rubehn , C. Henle , S. Kisban , S. Herwik , P. Ruther , M. Schuettler , Prog. Brain Res. 175, 297 (2009).

24. D.D. Zhou , E. Greenbaum , Implantable Neural Prostheses 1: Devices and Applications (Springer, NY, 2009), vol. 1.

25. D.D. Zhou , E. Greenbaum , Implantable Neural Prostheses 2: Techniques and Engineering Approaches (Springer, NY, 2010), vol. 2.

26. C. Hassler , T. Boretius , T. Stieglitz , J. Polym. Sci., Part B: Polym. Phys. 49, 18 (2011).

27. D.F. Williams , Biomaterials 29, 2941 (2008).

34. M. Schuettler , S. Stiess , B.V. King , G.J. Suaning , J. Neural Eng. 2, 121 (2005).

36. R.A. Green , J.S. Ordonez , M. Schuettler , L.A. Poole-Warren , N.H. Lovell , G.J. Suaning , J. Biomater. 31 (5), 886 (2009).

39. C. Henle , M. Raab , J.G. Cordeiro , S. Doostkam , A. Schulze-Bonhage , T. Stieglitz , J. Rickert , Biomed. Microdevices 13, 59 (2011).

42. D. Rodger , A.J. Fong , W. Li , Sens. Actuators, B 132, 449 (2008).

43. N. Lago , K. Yoshida , K.P. Koch , X. Navarro , IEEE Trans. Biomed. Eng. 54, 281 (2007).

44. B. Rubehn , C. Bosman , R. Oostenveld , P. Fries , T. Stieglitz , J. Neural Eng. 6 (3), 036003 (2009).

47. G.G. Naples , J.T. Mortimer , A. Scheiner , J.D. Sweeney , IEEE Trans. Biomed. Eng. 35, 905 (1988).

49. L. Kenney , G. Bultstra , R. Buschman , P. Taylor , G. Mann , J. Holsheimer , A. Nene , M. Tenniglo , H. van der Aa , J. Hobby , J. Artif. Organs 26, 267 (2002).

50. K.H. Polasek , H.A. Hoyen , M.W. Keith , D.J. Tyler , IEEE. Trans. Neural. Syst. Rehabil. Eng. 15, 76 (2007).

51. J. Delbeke , M.C. Wanet-Defalque , B. Gerard , M. Troosters , G. Michaux , J. Artif. Organs 26, 232 (2002).

52. C. Veraart , M.C. Wanet-Defalque , B. Gerard , A. Vanlierde , J. Delbeke , J. Artif. Organs 27, 996 (2003).

53. C. Veraart , C. Raftopoulos , J.T. Mortimer , J. Delbeke , D. Pins , G. Michaux , A. Vanlierde , S. Parrini , M.C. Wanet-Defalque , Brain Res. 813, 181 (1998).

54. J. Weiland , Engineering in Medicine and Biology Society, 2009. EMBC 2009. Annual International Conference of the IEEE (2009), pp. 41404143.

55. E.C. Leuthardt , G. Schalk , J.R. Wolpaw , J.G. Ojemann , D.W. Moran , J. Neural Eng. 1, 63 (2004).

57. P.K. Campbell , K.E. Jones , R.J. Huber , K.W. Horch , R.A. Normann , IEEE Trans. Biomed. Eng. 38, 758 (1991).

60. S. Kisban , Engineering in Medicine and Biology Society, EMBS 2008. 30th Annual International Conference of the IEEE (2008), pp. 20162019.

61. K. Warwick , M. Gasson , B. Hutt , I. Goodhew , P. Kyberd , B. Andrews , P. Teddy , A. Shad , Arch. Neurol. 60 (10), 1369 (2003).

62. L.R. Hochberg , M.D. Serruya , G.M. Friehs , J.A. Mukand , M. Saleh , A.H. Caplan , Nature 442, 164 (2006).

64. S.F. Cogan , IEEE Trans. Biomed. Eng. 57, 2313 (2010).

65. M. Gierthmuehlen , T. Ball , X. Wang , C. Henle , M. Raab , T. Stieglitz , J. Kaminsky , J. Neurosci. Methods 202, 77 (2011).

66. T. Oh , O. Gilad , A. Ghosh , M. Schuettler , D.S. Holder , Med. Biol. Eng. Comput. 49, 593 (2011).

67. D. Tsai , J.W. Morley , G.J. Suaning , N.H. Lovell , J. Neurophysiol. 102 (5), 2982 (2009).

69. J. Richardson , R.R. Miller , W.M. Reichert , Biomaterials 14, 627 (1993).

71. E. Maynard , C. Nordhausen , R. Normann , Electroencephalogr. Clin. Neurophysiol. 102, 228 (1997).

72. P.J. Rousche , R.A. Normann , J. Neurosci. Methods 82, 1 (1998).

73. T. Lefurge , E. Goodall , K. Horch , L. Stensaas , A. Schoenberg , Ann. Biomed. Eng. 19, 197 (1991).

74. A. Gilletti , J. Muthuswamy , J. Neural Eng. 3, 189 (2006).

75. J.E. Shelby , Introduction to Glass Science and Technology (Royal Society of Chemistry, Cambridge, UK, 2005).

76. G.B. Alexander , W.M. Heston , R.K. Iler , J. Phys. Chem. 58 (6), 453 (1954).

77. R. Sweitzer , J. Bioact. Compat. Polym. 21 (1), 5 (2006).

78. C. Gonzalez , M. Rodriguez , J. Neurosci. Methods 72, 189 (1997).

80. D.B. Shire , S.K. Kelly , J. Chen , P. Doyle , M.D. Gingerich , S.F. Cogan , W.A. Drohan , O. Mendoza , L. Theogarajan , J.L. Wyarr , J.H. Waler , J.-A.M. Mason , IEEE Trans. Biomed. Eng. 56, 2502 (2009).

82. F.J. Rodríguez , D. Ceballos , M. Schuettler , E. Valderrama , T. Stieglitz , X. Navarro , J. Neurosci. Met. 98, 105 (2000).

83. D. Ceballos , A. Valero , E. Valderrama , M. Schuettler , T. Stieglitz , X. Navarro , J. Biomed. Mater. Res. 60, 517 (2002).

84. X. Navarro , T.B. Krueger , N. Lago , S. Micera , T. Stieglitz , P. Dario , J. Periph. Nerv. Syst. 10, 229 (2005).

85. D. Farina , K. Yoshida , T. Stieglitz , K.P. Koch , J. Appl. Physiol. 104, 821 (2008).

86. J. Badia , T. Boretius , E. Udina , T. Stieglitz , X. Navarro , IEEE Trans. Biomed. Eng. 58, 2324 (2011).

89. L.K. Massey , Permeability Properties of Plastics and Elastomers: A Guide to Packaging and Barrier Materials, 2nd ed. (William Andrew Publishing, NY, 2003); M. Ree, H. Han, C.C. Gryte, J. Appl. Polym. Sci. 33, 505 (1995).

90. R. Buchhold , A. Nakladal , G. Gerlach , K. Sahre , K.-J. Eichhorn , Thin Solid Films 312, 232 (1998).

92. B. Rubehn , T. Stieglitz , Biomaterials 31, 3449 (2010).

93. R. DeIasi , J. Russell , J. Appl. Polym. Sci. 15, 2965 (1971).

94. R. DeIasi , J. Appl. Polym. Sci. 16 (11), 2909 (1972).

96. G.E. Loeb , R.A. Peck , J. Neurosci. Methods 64 (1), 95 (1996).

97. J.F. Hetke , J.L. Lund , K. Najafi , K.D. Wise , D.J. Anderson , IEEE Trans. Biomed. Eng. 41 (4), 314 (1994).

98. J. Huang , R.J. Cranford , T. Matsuura , C. Roy , J. Appl. Polym. Sci., 87, 2306 (2003).

99. T.P. Russel , H. Gugger , J.D. Swalen , Polym. Sci. Ser. A Polym. Phys. 21, 1745 (1983).

100. E. Gattiglia , T.P. Russel , Polym. Sci. Ser. A Polym. Phys. 27, 2131 (1989).

101. T. Stieglitz , H. Beutel , J.U. Meyer , Sens. Actuators, A 60, 240 (1997).

19. T. Stieglitz , Int. J. Micro-Nano Scale Transport 1, 139 (2010).

104. H.K. Yasuda , Plasma Processes Polym. 2 (4), 293 (2005).

105. S. Murray , C. Hillman , J. Electron. Packag. 126, 390 (2004).

106. K. Mittal , Electrocomponent Sci. Technol. 3, 21 (1976).

107. J. Comyn , Adhesion Science (Royal Society of Chemistry, Cambridge, UK, 1997).

114. R. Green , N. Lovell , G. Wallace , Biomaterials 29, 3393 (2008).

117. R.L. White , L.A. Roberts , N.E. Cotter , Ann. N.Y. Acad. Sci. 405, 183 (1983).

118. D.P. Woodruff , The Chemical Physics of Solid Surfaces (Elsevier, NY, 2002).

120. E. Sacher , J.R. Susko , J. Appl. Polym. Sci. 23, 2355 (1979).

121. E. Sacher , J.R. Susko , J. Appl. Polym. Sci. 26, 679 (1981).

122. C. Girardeaux , E. Druet , P. Demoncy , M. Delamar , J. Electron. Spectrosc. Relat. Phenom. 74, 57 (1995).

123. F.D. Egitto , L.J. Matienzo , K.J. Blackwell , A.R. Knoll , J. Adhes. Sci. Technol. 8 (4), 411 (1994).

124. C. Girardeaux , E. Druet , P. Demoncy , M. Delamar , J. Electron. Spectrosc. Relat. Phenom. 70, 11 (1994).

125. D.J. Ham , J.S. Lee , Energies 2, 873 (2009).

127. B.K. Furman , K.D. Childs , H. Clearfield , R. Davis , S. Purushothaman , J. Vac. Sci. Technol., A 10 (4), 2913 (1992).

128. T.C. Chou , J. Mater. Sci. 26, 1412 (1991).

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Bulletin
  • ISSN: 0883-7694
  • EISSN: 1938-1425
  • URL: /core/journals/mrs-bulletin
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 9
Total number of PDF views: 81 *
Loading metrics...

Abstract views

Total abstract views: 332 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 28th May 2017. This data will be updated every 24 hours.