Hostname: page-component-cb9f654ff-k7rjm Total loading time: 0 Render date: 2025-08-19T00:06:53.447Z Has data issue: false hasContentIssue false
  • English
  • Français

Development of Evaluation Method for Delamination StrengthBetween Micro-Sized Materials in MEMS Devices

Published online by Cambridge University Press:  26 February 2011

Chiemi Ishiyama ,
Junichi Hata ,
Satoru Koyama ,
Masato Sone  and
Yakichi Higo
Chiemi Ishiyama
Affiliation:
ishiyama.c.aa@m.titech.ac.jp, Tokyo Institute of Technology, Precision and Intelligence Labratory, 4259 Nagatsuta, Midoriku, Yokohama, 226-8503, Japan
Junichi Hata
Affiliation:
hata.j.aa@ames.pi.titech.ac.jp, Tokyo Institute of Technology, Precision and Intelligence Labratory, 4259 Nagatsuta, Midoriku, Yokohama, 226-8503, Japan
Satoru Koyama
Affiliation:
koyama.s.ab@m.titech.ac.jp, Tokyo Institute of Technology, Precision and Intelligence Labratory, 4259 Nagatsuta, Midoriku, Yokohama, 226-8503, Japan
Masato Sone
Affiliation:
msone@pi.titech.ac.jp, Tokyo Institute of Technology, Precision and Intelligence Labratory, 4259 Nagatsuta, Midoriku, Yokohama, 226-8503, Japan
Yakichi Higo
Affiliation:
yhigo@pi.titech.ac.jp, Tokyo Institute of Technology, Precision and Intelligence Labratory, 4259 Nagatsuta, Midoriku, Yokohama, 226-8503, Japan
Get access

Abstract

Evaluation method for delamination strength of micro-sized materials hasbeen developed using by FEM and measurement of load-displacement curve ofmicro-sized specimen. This evaluation method is applied to micro-sizedcylindrical SU-8 specimens on Si substrate. The maximum shear stress betweenSU-8 and Si was analyzed with FEM. Fracture load required to delaminate thetwo materials was examined using a mechanical testing machine formicro-sized materials, which have been developed in our group. Thedelamination strength was determined from the maximum shear stress and thefracture load.

Keywords

adhesionmicroelectro-mechanical (MEMS)strength

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1. Volinsky, A. A., Moody, N. R., Gerberich, W. W., Acta Mater., 50, (2002), 441–466 Google Scholar
2. Popov, Egor P., Engineering Mechanics of solids. PRENTICE HALL, Inc., New jersey, 1990 Google Scholar
3. Higo, Y., Takashima, K., Shimojo, M, Sugiura, S, Pfister, B., Swain, M. V., MRS Symposium Proceeding, 605, (2000), 241–246.Google Scholar