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Direct Writing of Carbon Interconnections

Published online by Cambridge University Press:  26 February 2011

Alan M. Lyons
Affiliation:
AT&T Bell Laboratories, 600 Mountain Avenue, Murray Hill, NJ 07974
C. W. Wilkins Jr.
Affiliation:
AT&T Bell Laboratories, 600 Mountain Avenue, Murray Hill, NJ 07974
F. T. Mendenhall
Affiliation:
AT&T Consumer Products Laboratory, Indianapolis, IN 46206
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Abstract

The in situ formation of conductive carbon lines in polymeric substrates was demonstrated by “writing” with CO2 and Nd:YAG lasers. The formation of conductive carbon lines on polymer substrates proceeds through a series of steps including; absorption of light, initiation of decomposition reactions, and thermal propagation of the pyrolysis. The effect of material composition, power density, energy density, and wavelength on the electrical resistance and morphology of the carbon lines was investigated. Above a critical laser energy density (= 400 J/cm2) sufficient light is absorbed by the substrate such that initiation of the pyrolysis reactions occurs. The decomposed polymer strongly absorbs the incident radiation and the thermal propagation of the reactions forms shiny, conductive, carbon lines. The dimensions of these lines are dependent on the energy density impinging on the polymer and are independent of the wavelengths investigated. If too high a power density is employed (∼ 104 Watts/cm2), an ablated track is formed down the center of the carbon line. This results in the relative insensitivity of the linear resistance with increasing power above 104 Watts/cm2.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1 Conley, R. T., “Thermosetting Resins”, in Thermal Stability of Polymers edited by Conley, R. T. (Marcel Dekker, New York, 1970), p. 457.Google Scholar
2 Fitzer, E. and Schafer, W., Carbon, 8, 353 (1970).Google Scholar
3 Knop, A. and Scheib, W., Chemistry and Applications of Phenolic Resins, (Springer, Berlin, 1979).Google Scholar
4 Lyons, A. M., Hale, L. P., and Wilkins, C. W. Jr., J. Vac. Sci. Technol. B, 3 (1), 447, (1985). A. M. Lyons, J. Non-Crystalline Solids, 70^ 99, (1985).Google Scholar
5 Raffel, J. I., Freidin, J. F., and Chapman, G. H., Appl. Phys. Lett., 42, 705 (1983).Google Scholar
6 Srinivasan, R. and Mayne-Banton, V., Appl. Phys. Lett., 41, 576 (1982). J. E. Andrew, P. E. Dyer, D. Forster, P.H. Key, Appl. Phys. Lett., 43, 717 (1983).Google Scholar
7 Garrison, B. J. and Srinivasan, R., Appl. Phys. Lett., 44, 849 (1984). G. Koren and J. T. C. Yeh, Appl. Phys. Lett., 44, 1112 (1984).Google Scholar