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Effect of Humidity on Charge Profiles and Thermal Properties of 1.7 μM Polyimide Films on Silicon Substrates

Published online by Cambridge University Press:  10 February 2011

P. Bloss ,
A. S. De Reggi  and
H. Schafer
P. Bloss
Affiliation:
Polymers Division, Bldg. 224 / Rm. B320, National Institute of Standards and Technology, Gaithersburg, MD 20899, peter.bloss@nist.gov
A. S. De Reggi
Affiliation:
Polymers Division, Bldg. 224 / Rm. B320, National Institute of Standards and Technology, Gaithersburg, MD 20899, peter.bloss@nist.gov
H. Schafer
Affiliation:
HF-NMR Facility, NSR Center, University of Nijmegen, Toernooiveld 1, NL-6525 ED Nijmegen, THE NETHERLANDS
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Abstract

Using an improved version of the thermal pulse (TP) method for determining electric field profiles and thermal parameters, we have obtained for the first time field profiles in 1.7 μm thick polyimide (PI) films spin-coated on Si wafers. As-coated films were found to have an internal field caused by negative charges within 200 nm of the free (pulsed) surface believed due to electrochemical reactions involving water. The change near the pulsed surface was stable up to 200 °C and would not be switched by applied fields of ±1 V/μm. The charge distribution and the thermal parameters were found to be sensitive to humidity

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 515: Symposium J – Electronic Packaging Materials Science X , 1998 , 251
Copyright
Copyright © Materials Research Society 1998

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References

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