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Fabrication of a Conductometric Sensor for Crevice Corrosion Studies

Published online by Cambridge University Press:  01 February 2011

Xiaoyan Wang ,
Robert G. Kelly ,
Jason S. Lee  and
Michael L. Reed
Xiaoyan Wang
Affiliation:
Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904-4743, U.S.A.
Robert G. Kelly
Affiliation:
Department of Materials Science and Engineering, University of Virginia, Charlottesville, VA 22904-4745, U.S.A.
Jason S. Lee
Affiliation:
Department of Materials Science and Engineering, University of Virginia, Charlottesville, VA 22904-4745, U.S.A.
Michael L. Reed
Affiliation:
Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904-4743, U.S.A.
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Abstract

Microfabricated crevice corrosion samples have been employed in experiments that provided important information necessary for developing an accurate, comprehensive, and reliable crevice corrosion model. Acquiring real-time spatial information of crevice corrosion is also essential in analyzing corrosion processes. Integration of arrays of solid-state microsensors, such as conductometric sensors, pH and other ion concentration potentiometric sensors, into the crevice corrosion samples will allow for in-situ real-time data acquisition. In the present work, crevice corrosion samples with conductometric sensor arrays are made using the techniques developed for thin film semiconductor processing and microelectromechanical systems (MEMS) fabrication. The crevice corrosion testing sample is constructed by coupling a crevice former to a crevice substrate and has a uniform crevice gap. A conductometric sensor array built on a silicon wafer is incorporated into the crevice former. Each of these sensors is composed of a pair of thin film gold electrodes, which enables in-situ spatial conductivity analysis of crevice corrosion. Information about metal ion concentration and active chemistry inside the crevice can also be obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 729: Symposium U – MEMS and BioMEMS , 2002 , U3.13
Copyright
Copyright © Materials Research Society 2002

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References

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