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Kodas, Toivo T.
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Hampden‐Smith, Mark J.
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The Chemistry of Metal CVD.
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Published online by Cambridge University Press: 22 February 2011
Nanometer-sized particles of Mo, Ta, Nb, and Pd were formed by gas-phase reactions of metal halides and β-diketonates in the presence of hydrogen. Particle diameters ranged from 5-100 nm depending on the reaction temperature (500-950 βC) and precursor characteristics. Gasphase particle concentrations reached 108/cm3. These particles are suitable as etching masks on semiconductor substrates for generation of zero-dimensional quantum structures.