Hostname: page-component-cb9f654ff-p5m67 Total loading time: 0 Render date: 2025-08-19T21:48:42.322Z Has data issue: false hasContentIssue false
  • English
  • Français

Generalized Ellipsometry Using a Rotating Sample

Published online by Cambridge University Press:  17 March 2011

Weiliang Xu ,
Lowell T. Wood  and
Terry D. Golding
Lowell T. Wood
Affiliation:
Department of Physics, University of Houston, Houston, Texas 77204-5506, U.S.A
Get access

Abstract

We propose a generalized ellipsometric technique using a rotating sample. The ellipsometer consists of a polarizer, a rotatable sample holder, an analyzer, and a detector. Fourier coefficients are measured and used to extract the system’s dielectric tensors and film thicknesses. The main advantage of the technique is that all parts of the ellipsometer are fixed except the sample, whose azimuth angle can be modulated. We show calculated responses to isotropic and anisotropic materials as well as superlattices. Potential applications for characterizations of anisotropic nanostructures are discussed.

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

[1] Thompson, D. W., DeVries, M. J., Tiwald, T. E., and Woollam, J. A., Thin Solid Films 313–314, 341 (1998).Google Scholar
[2] Jellison, G. E. and Boatner, L. A., Phys. Rev. B 58, 3586 (1998).Google Scholar
[3] Collins, R. W. and Koh, J., J. Opt. Soc. Am. A 16, 1997 (1999).Google Scholar
[4] Xu, W., Wood, L. T., and Golding, T. D., Thin Solid Films (To be published).Google Scholar
[5] Xu, W., Wood, L. T., and Golding, T. D., J.Opt. Soc. Am A (Submitted for publication).Google Scholar
[6] Xu, W., Wood, L. T., and Golding, T. D., Phys. Rev. B. 61, 1740 (2000).Google Scholar
[7] Yeh, P., J. Opt. Soc. Am. 69, 742 (1979).Google Scholar
[8] Bevington, P. R., Data Reduction and Error Analysis for the Physical Sciences, Mc-Graw-Hill Book Company, New York. p. 242.Google Scholar