Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by
Crossref.
Biebericher, A. C. W.
Bezemer, J.
van der Weg, W. F.
and
Goedheer, W. J.
2000.
Deposition rate in modulated radio-frequency silane plasmas.
Applied Physics Letters,
Vol. 76,
Issue. 15,
p.
2002.
Morrison, S.
and
Madan, A.
2000.
Deposition of amorphous silicon solar cells via the pulsed PECVD technique.
p.
928.
Kessels, W. M. M.
van de Sanden, M. C. M.
and
Schram, D. C.
2000.
Film growth precursors in a remote SiH4 plasma used for high-rate deposition of hydrogenated amorphous silicon.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,
Vol. 18,
Issue. 5,
p.
2153.
Biebericher, A. C. W.
Bezemer, J.
Weg, W. F. van der
and
Goedheer, W. J.
2000.
Fast growth of amorphous silicon layers by amplitude modulation PECVD.
MRS Proceedings,
Vol. 609,
Issue. ,
Das, Ujjwal K.
Morrison, Scott
and
Madan, Arun
2002.
Deposition of microcrystalline silicon solar cells via the pulsed PECVD technique.
Journal of Non-Crystalline Solids,
Vol. 299-302,
Issue. ,
p.
79.
Sark, Wilfried G.J.H.M. van
2002.
Handbook of Thin Films.
p.
1.
Van Sark, Wilfried G.J.H.M.
2002.
Advances in Plasma-Grown Hydrogenated Films.
Vol. 30,
Issue. ,
p.
1.
Morrison, S.
Das, Ujjwal
and
Madan, Arun
2002.
DEPOSITION OF THIN FILM SILICON USING THE PULSED PECVD AND HWCVD TECHNIQUES.
Materials and Manufacturing Processes,
Vol. 17,
Issue. 5,
p.
607.
Biebericher, A. C. W.
van der Weg, W. F.
Rath, J. K.
Akdim, M. R.
and
Goedheer, W. J.
2003.
Gas-efficient deposition of device-quality hydrogenated amorphous silicon using low gas flows and power modulated radio-frequency discharges.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,
Vol. 21,
Issue. 1,
p.
156.
Mukherjee, C
Anandan, C
Seth, T
Dixit, P.N
and
Bhattacharyya, R
2003.
Photoconducting a-Si:H films grown at high deposition rates by pulsing a VHF 100 MHz discharge.
Thin Solid Films,
Vol. 423,
Issue. 1,
p.
18.
Zhu, Feng
Hu, Jian
Matulionis, Ilvydas
Kunrath, Augusto
and
Madan, Arun
2009.
Properties of Nano-crystalline Silicon-Carbide Films Prepared Using Modulated RF- PECVD.
MRS Proceedings,
Vol. 1153,
Issue. ,