Hostname: page-component-68c7f8b79f-rgmxm Total loading time: 0 Render date: 2025-12-18T21:15:36.323Z Has data issue: false hasContentIssue false
  • English
  • Français

Kinetics and Mechanism of the C49 to C54 Titanium Disilicide Polymorphic Transformation

Published online by Cambridge University Press:  03 September 2012

Z. Ma ,
G. Ramanath  and
L.H. Allen
Z. Ma
Affiliation:
Department of Materials Science and Engineering and Coordinated Science Laboratory, University of Illinois at Urbana- Champaign, Urbana, IL 61801
G. Ramanath
Affiliation:
Department of Materials Science and Engineering and Coordinated Science Laboratory, University of Illinois at Urbana- Champaign, Urbana, IL 61801
L.H. Allen
Affiliation:
Department of Materials Science and Engineering and Coordinated Science Laboratory, University of Illinois at Urbana- Champaign, Urbana, IL 61801
Get access

Abstract

The kinetics and mechanism of the C49 to C54 TiSi2 polymorphic transformation have been investigated in a temperature range from 660 to 720°C using in situ sheet resistance measurement and transmission electron microscopy. The kinetics results were correlated with the microstructural changes during the phase transformation. The main structural characteristics demonstrating the mechanism of the transformation were established by examining the nucleation and growth of the C54-TiSi2 in the polycrystalline C49-TiSi2 thin films. It was found that the C54 nuclei predominantly formed at grain edges (three-grain junctions) of the C49 phase and grew very fast by moving its incoherent interphase boundaries. Preliminary results have not revealed rigorous orientation relationships between the two phases. It is suggested that the C49 to C54 structural transition is massive in nature.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 320: Symposium D – Silicides, Germanides, and Their Interfaces , 1993 , 361
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1. Beyers, R. and Sinclair, R., J. Appl. Phys. 57, 5240 (1985).Google Scholar
2. Binary Alloy Phase Diagrams, edited by Massalski, T. B. (ASM International, Materials Park, Ohio, 1986).Google Scholar
3. Ma, Z., Xu, Y., Allen, L. H., and Lee, S., J. Appl. Phys. 74, 2954 (1993).Google Scholar
4. Kirtikar, A. and Sinclair, R., Mat. Res. Soc. Symp. Proc. 260, 227 (1992).CrossRefGoogle Scholar
5. Wang, M. H. and Chen, L. J., J. Appl. Phys. 71, 5918 (1992).CrossRefGoogle Scholar
6. Thompson, R. D., Takai, H., Psaras, P. A., and Tu, K. N., J. Appl. Phys. 61, 540 (1987).Google Scholar
7. Li, X. H., Carlsson, J. R. A., Gong, S. F., and Hentzell, H. T. G., J. Appl. Phys. 72, 514 (1992).CrossRefGoogle Scholar
8. Matsubara, Y., Horiuchi, T., and Okumura, K., Appl. Phys. Lett. 62, 2634 (1993).Google Scholar
9. Ma, Z., Allen, L. H., and Lee, S., Mat. Res. Soc. Symp. Proc. 237, 661 (1992).Google Scholar
10. Christian, J. W., The Theory of Transformations in Metals and Alloys, Part 1, 2nd Ed. (Pergamon, Oxford, 1975).Google Scholar
11. Cahn, J. W., Acta Metall. 4, 449 (1956).Google Scholar
12. Robinson, P. M. and Bever, M. B., in Intermetallic Compounds, edited by Westbrook, J. H. (Wiley, New York, 1967), p. 38.Google Scholar
13. Clemm, P. J. and Fisher, J. C., Acta Metall. 3, 70 (1955).Google Scholar
14. Massalski, T. B., in Phase Transformations (ASM, Metals Park, Ohio, 1970), p. 433.Google Scholar