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Published online by Cambridge University Press: 15 February 2011
In order to model and design micromechanical sensors and actuators, it is of crucial importance that thin film mechanical parameters, such as the Young's modulus and the residual stress, are known. In this paper, the parameter extraction method using resonant structures has been used to obtain these data and has been compared with the bulge test. Circular aluminum diaphragms have been used as samples.