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Microhardness, Structure, and Composition Study of Amorphous Hydrogenated Boron Carbide

Published online by Cambridge University Press:  15 February 2011

Shu-Han Lin ,
Dong Li  and
Bernard J. Feldman
Shu-Han Lin
Affiliation:
Department of Physics and Center for Molecular Electronics, University of Missouri, St. Louis, MO 63121
Dong Li
Affiliation:
Department of Materials Science and Engineering and Center for Engineering Tribology, Northwestern University, Evanston, IL 60208
Bernard J. Feldman
Affiliation:
Department of Physics and Center for Molecular Electronics, University of Missouri, St. Louis, MO 63121
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Abstract

We have grown amorphous hydrogenated boron carbide thin films by rf plasma decomposition of diborane and methane. The chemical composition, infrared absorption, optical absorption, and microhardness of these thin films were measured. As a function of increasing diborane concentration in the feedstock, we observe increasing boron and hydrogen concentrations, increasing infrared absorption at 1330 cm−1 due to boron icosahedra, increasing optical bandgaps, and an unchanging microhardness in the grown films. The microhardness should have decreased due to the increasing hydrogen concentration; this expected decrease may have been balanced by an increased microhardness due to the boron icosahedra.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 383: Symposium I – Mechanical Behavior of Diamond and Other Forms of Carbon , 1995 , 127
Copyright
Copyright © Materials Research Society 1995

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References

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