No CrossRef data available.
Published online by Cambridge University Press: 26 February 2011
e have undertaken the exploration of the AlxSi1-xsystems to discover new alloys with enhanced properties. We describe themechanical properties of thin film AlxSi1-x alloysdetermined through indentation experiments. Combinatorial methods were usedto systematically control thin film microstructure through variations incomposition and growth temperature. Discrete libraries of compositionallygraded films have been sputter deposited onto silicon substrates to producetwo structural phase regions: amorphous Al-Si and amorphous Si pluscrystalline Al. The mechanical properties of the thin films were determinedby analyzing the load-displacement traces based on the Oliver-Pharr method.X-ray diffraction was used to investigate the microstructures and determinethe crystallite sizes.