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Reaction of Barium bis(β-Diketonate) Complexes with the Surface of Magnesium Oxide

Published online by Cambridge University Press:  25 February 2011

R. A. Gardiner ,
P. S. Kirlin ,
G. A. M. Hussein  and
B. C. Gates
R. A. Gardiner
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT
P. S. Kirlin
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT
G. A. M. Hussein
Affiliation:
Center for Catalytic Science and Technology, Department of Chemical Engineering, University of Delaware, Newark, DE
B. C. Gates
Affiliation:
Center for Catalytic Science and Technology, Department of Chemical Engineering, University of Delaware, Newark, DE
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Abstract

Second generation barium MOCVD precursors have been investigated for the growth of high quality superconducting and ferroelectric thin films. Novel barium β-diketonate polyether adducts have been synthesized and characterized by X-ray crystallography, 1H and 13c nmr spectroscopies, elemental analysis, melting and sublimation points. Metalorganic chemical vapor deposition experiments have been performed using this new class of barium β-diketonate polyether adducts. The as-deposited barium films were characterized by scanning electron microscopy and energy dispersive x-ray spectroscopy. These results were correlated with reaction intermediates observed by FT-IR in temperature programmed oxidation of barium bis(2,2,6,6-tetramethyl-3,5-heptanedionate) on magnesium oxide. Conditions under which the barium source reagents proceed to BaO, BaCo3 or BaF2 were elucidated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 271: Symposium N – Better Ceramics Through Chemistry V , 1992 , 933
Copyright
Copyright © Materials Research Society 1992

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References

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