Shape Memory and Magnetostrictive Materials for Mems
Published online by Cambridge University Press: 10 February 2011
Ferroic materials are ideally suited for actuators in MEMS applications. Ferro- elastic materials, i.e. shape memory alloys (SMAs), produce a significant, o. o. 104 microstrain, phase transformation induced thermoelastic eigenstrain. Rare earth based ferromagnetic materials possess large, o.o. 103 microstrain, saturation magnetostriction which can be developed at fields of the order of mT readily achieved in MEMS geometries. This paper discusses the essentials of the thermoelastic stress evolution in SMA/Substrate bimorphs and of the development of rare earth based ferromagnetic multilayers. SMA actuationunder the constraint of a substrate and the optimization of the multilayers are emphazized.
- Research Article
- MRS Online Proceedings Library (OPL) , Volume 546: Symposium AA – Materials Science of Microelectromechanical Systems (MEMS)… , 1998 , 145
- Copyright © Materials Research Society 1999