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A Study Of Anisotropy Of Spin Cast And Vapor Deposited Polyimide Films Using Internal Reflection Techniques

Published online by Cambridge University Press:  15 February 2011

Vladimir Liberman ,
Vincent Malba  and
Anthony F. Bernhardt
Vladimir Liberman
Affiliation:
Lawrence Livermore National Lab, P. O. Box 808, L-27 1, Livermore, CA 94550
Vincent Malba
Affiliation:
Lawrence Livermore National Lab, P. O. Box 808, L-27 1, Livermore, CA 94550
Anthony F. Bernhardt
Affiliation:
Lawrence Livermore National Lab, P. O. Box 808, L-27 1, Livermore, CA 94550
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Abstract

We have compared anisotropy of spin cast and vapor deposited polyimide (VDP) films, using internal reflection infrared spectroscopy. The films were deposited directly on the internal reflection element. We find that spin cast films are more anisotropic than their VDP counterparts, with the polyimide chains tending to align parallel to the substrate. Both films are found to contain more and less ordered regions. Within the ordered regions, the plane of the phenyl ring tends to align parallel to the substrate.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 443: Symposium H – Low-Dielectric Constant Materials II , 1996 , 15
Copyright
Copyright © Materials Research Society 1997

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