Hostname: page-component-76dd75c94c-vpfzz Total loading time: 0 Render date: 2024-04-30T09:15:32.091Z Has data issue: false hasContentIssue false
  • English
  • Français

Top-down and bottom-up nanofabrication for multipurpose applications.

Published online by Cambridge University Press:  01 February 2011

Enzo Di Fabrizio ,
Filippo Romanato ,
Stefano Cabrini ,
Francesco Deangelis ,
Arum Amy Yu ,
Rober Barsotti ,
Gioia Dealla Giustina ,
Giovanna Brusatin  and
Fracesco Stellacci
Enzo Di Fabrizio
Affiliation:
difabrizio@tasc.infm.it, 1University Of Magna Graecia, Campus Germaneto, Viale Europa, Catanzaro, N/A, IT-88100, Italy, +09613694218
Filippo Romanato
Affiliation:
romanato@tasc.infm.it, INFM-CNR, Lab. TASC, S.S. 14 km 163.5, Trieste, N/A, I-34012, Italy
Stefano Cabrini
Affiliation:
stefano.cabrini@elettra.trieste.it, INFM-CNR, Lab. TASC, S.S. 14 km 163.5, Trieste, N/A, I-34012, Italy
Francesco Deangelis
Affiliation:
f.deangelis@unicz.it, University Of Magna Graecia, Campus Germaneto, Viale Europa, Catanzaro, N/A, IT-88100, Italy
Arum Amy Yu
Affiliation:
yu@mit.edu, MIT, DMSE, 77 Mass. Ave., Cambridge, MA, 02139, United States
Rober Barsotti
Affiliation:
barsotti@mit.edu, MIT, DMSE, 77 Mass. Ave., Cambridge, MA, 02139, United States
Gioia Dealla Giustina
Affiliation:
gioia.dellagiustina@unipd.it, University of Padova, Dep. of Mechanical Engineering, via Marzolo 9, Padova, N/A, I-35131, Italy
Giovanna Brusatin
Affiliation:
giovanna.brusatin@unipd.it, University of Padova, Dep. of Mechanical Engineering, via Marzolo 9, Padova, N/A, I-35131, Italy
Fracesco Stellacci
Affiliation:
frstella@mit.edu, MIT, DMSE, 77 Mass. Ave., Cambridge, MA, 02139, United States
Get access

Abstract

In this article we will show three recent examples of combined strategies aiming at merging top-down and bottom-up approach for nanofabrication at nanoscale level. The first example shows the fabrication of nanogaps performed by Focus Ion Beam technique that have been used to measure the conductivity of few gold nanoparticles aggregates deposited by Dip Pen lithography. The second example deals with the parallel replica of high resolution master generated by Electron Beam lithography by means of an innovative lithographic process based on DNA supramolecular nano-stamping. The latter example proposes the possibility to generate, through radiation exposure, direct patterning of hybrid sol gel material doped with fluorescent molecules. The outline of the fabrication approaches and their scientific and technical perspective are discussed.

Keywords

lithography (removal)self-assemblysol-gel
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 921: Symposium T – Nanomanufacturing , 2006 , 0921-T03-06
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Valiev, K. A., The Physics of Sub-Micron Lithography _Plenum, New York, 1992.Google Scholar
2 Jager, W. H. de, Hagen, C. W., and Kruit, P., Microelectron. Eng. 30, 353 1996.Google Scholar
3 Klein, D. L. et al., Appl. Phys. Lett. 68, 2574, 1996.Google Scholar
4 Piner, R. D., Jin, Z., Feng, X., Hong, S. H., and Mirkin, C. A., Science 283, 661 (1999).Google Scholar
5 Lim, J. H. and Mirkin, C. A., Adv. Mater. (Weinheim, Ger.) 14, 1474 (2002).Google Scholar
6 Zhang, H., Lee, K. B., Li, Z., and Mirkin, C. A., Nanotechnology 14, 1113 (2003).Google Scholar
7 Demers, L. M., Ginger, D. S., Park, S. J., Li, Z., Chung, S. W., and Mirkin, C. A., Science 296, 1836 (2002).Google Scholar
8 Zhang, H., Chung, S. W., and Mirkin, C. A., Nano Lett. 3, 43 (2003).Google Scholar
9 Porath, D., Levi, Y., Tarabiah, M., and Millo, O., Phys. Rev. B 56, 9829 (1997).Google Scholar
10 Andres, R. P., Bein, T., Dorogi, M., Feng, S., Henderson, J. I., Kubiak, C. P., Mahoney, W., Osifchin, R. G., and Refenberger, R., Science 272, 1323 (1996).Google Scholar
11 Park, H. et al., Appl. Phys. Lett. 75, 301 (1999).Google Scholar
12 Klein, D. L. et al., Appl. Phys. Lett. 68, 2574 (1996).Google Scholar
13 McCarty, G. S., Nano Lett. 4 (2004).Google Scholar
14 Barsotti, R. J., , O'Connell, and Stellacci, F., Langmuir 20 (2004).Google Scholar
15 McCarty, G. S., Nano Lett. 4 (2004).Google Scholar
16 Yu, AA, Savas, T, Cabrini, S, diFabrizio, E, Smith, HI, Stellacci, F; J.A.C.S. 127 (48): 16774–16775 DEC 7 2005 Google Scholar
17 Xia, Y. N.; Whitesides, G. M. Angew. Chem., Int. Ed. 1998, 37, 551–575.Google Scholar
18 Bruinink, C. M.; Nijhuis, C. A.; Peter, M.; Dordi, B.; Crespo-Biel, O.; Auletta, T.; Mulder, A.; Schonherr, H.; Vancso, G. J.; Huskens, J.; Reinhoudt, D. N. Chem.-Eur. J. 2005, 11, 3988–3996.Google Scholar
19 Auletta, T. et al. Angew. Chem., Int. Ed. 2004, 43, 369–373.Google Scholar
20 Renault, J. P.; Bernard, A.; Juncker, D.; Michel, B.; Bosshard, H. R.; Delamarche, E. Angew. Chem.-Int. Edit. 2002, 41, 2320–2323.Google Scholar
21 Fixe, F.; Dufva, M.; Telleman, P.; Christensen, C. B. V. Nucleic Acids Res. 2004, 32.Google Scholar
22 Love, J. C.; Estroff, L. A.; Kriebel, J. K.; Nuzzo, R. G.; Whitesides, G. M. Chem. Rev. 2005, 105, 1103–1169.Google Scholar
23 Schottner, G., Chem. Mater. 2001, 13, 3422–3435 Google Scholar
24 Sanchez, C., Soler-Illia, G. J. de A. A., Ribot, F., Lalot, T., Mayer, C. R.,Cabuil, V., Chem. Mater. 2001, 13, 3061–3083 Google Scholar
25 Rantalaa, J.T.,*, Pennera, R.S., Honkanena, S., VaÉhaÉkangasb, J., Fallahia, M., Peyghambarian, N., Thin Solid Films 345 (1999) 185–187 Google Scholar
26 Kragh, S., Balslev, S., and Kristensen, A., Proceedings of the 7th International; Conference on Miniaturized Chemical and Biochemical Analysis Systems _microTAS 2003_, Squaw Valley, CA, October 5–9, 2003, pp. 1331–1334.Google Scholar