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Advances in Encapsulating Elastically Stretchable Microelectrode Arrays

  • Oliver Graudejus (a1), Candice Tsay (a1), Sigurd Wagner (a1), Zhe Yu (a2), Barclay Morrison (a2) and Stephanie Lacour (a3)...

Stretchable microelectrode arrays (SMEAs) that are fabricated on the compliant silicone poly dimethyl siloxane (PDMS) have potential applications for research on traumatic brain injury (TBI). Increasing the number of electrodes in the array improves the accuracy in assessing the effects of traumatic injury to cell tissue cultures. The currently available encapsulation process with a photopatternable silicone limits the electrode density on the array. The present research examines four factors in the encapsulation process: exposure dose, scattered and reflected light as well as hard bake time. Careful optimization of these four factors leads to a significant reduction of the minimum feature size of a contact via patterned into the encapsulation layer, thus enabling an increase of the electrode density on the array.

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2.Lacour, S. P., Yu, Z., Morrison, B. III, Tsay, C., and Wagner, S., Stretchable microelectrode arrays for dynamic neural recording of in vitro mechanically injured brain, Proceedings of the 4th IEEE Conference on Sensors, 2005, pp. 617620.
3.Yu, Z., Tsay, C., Lacour, S.P., Wagner, S. and Morrison, B. III Stretchable microelectrode arrays: A tool for discovering mechanisms of functional deficits underlying traumatic brain injury and interfacing neurons with neuroprosthetics, Engineering in Medicine and Biology Society, 2006, 28 th International Conference of the IEEE, pp. 67326735.
4.Wagner, S., Lacour, S.P., Jones, J., Hsu, P.I., Sturm, J., Li, T., Suo, Z., Electronic skin: architecture and components, Physica E 25 (2004) 326334.
5.Lacour, S.P., Wagner, S., Thin film transistor circuits integrated onto elastomeric substrates for elastically stretchable electronics, Electron Devices Meeting, 2005, IEDM Technical Digest, IEEE International, pp. 101104.
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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