Hostname: page-component-848d4c4894-75dct Total loading time: 0 Render date: 2024-05-09T06:59:16.299Z Has data issue: false hasContentIssue false
  • English
  • Français

Atomic Scale Analysis of InGaN Multi-Quantum Wells

Published online by Cambridge University Press:  10 February 2011

M. Benamara ,
Z. Liliental-Weber ,
W. Swider ,
J. Washburn ,
R. D. Dupuis ,
P. A. Grudowski ,
C. J. Eiting ,
J. W. Yang  and
M. A. Khan
M. Benamara
Affiliation:
E. O. Lawrence Berkeley National Laboratory, Berkeley CA 94720.
Z. Liliental-Weber
Affiliation:
E. O. Lawrence Berkeley National Laboratory, Berkeley CA 94720.
W. Swider
Affiliation:
E. O. Lawrence Berkeley National Laboratory, Berkeley CA 94720.
J. Washburn
Affiliation:
E. O. Lawrence Berkeley National Laboratory, Berkeley CA 94720.
R. D. Dupuis
Affiliation:
Microelectronics Research Center, University of Texas, Austin TX 78712.
P. A. Grudowski
Affiliation:
Microelectronics Research Center, University of Texas, Austin TX 78712.
C. J. Eiting
Affiliation:
Microelectronics Research Center, University of Texas, Austin TX 78712.
J. W. Yang
Affiliation:
ECE Dept., University of South Carolina, Columbia, SC 29208.
M. A. Khan
Affiliation:
ECE Dept., University of South Carolina, Columbia, SC 29208.
Get access

Abstract

InGaN multiquantum wells grown by MOCVD on GaN have been investigated by transmission electron microscopy techniques and numerical analysis of high resolution (HREM) images. One objective of this research was to correlate the atomic structure and emission mechanisms of InGaN quantum well. The studied layers contained 13% or 20% In. It was shown that GaN/InGaN interfaces are rather rough and exhibit an oscillating contrast. Structural defects were found on these interfaces. The relative c-lattice parameter variation in the well was determined using numerical processing of HREM images. The lattice spacings appear to be larger than that expected from Vegard's law suggesting the presence of a biaxial strain. Further observations also revealed a redistribution of In within the well. Instead of a continous In-rich layer, quantum dots were often observed along the well with a regular spacing. The formation of these In-rich dots was not intented and their presence suggests either a periodic modulation of strain along the well or In-rich cluster formation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 572: Symposium Y – Wide-Bandgap Semiconductors for High-Power, High Frequency… , 1999 , 357
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Perlin, P., Kisielowski, C., Iota, V., Weinstein, B. A., Mattos, L., Shapiro, N., Kruger, J., Weber, E. R. and Yang, J., Appl. Phys. Lett. 73 (19), (1998).Google Scholar
[2] Chichibu, S., Azuhata, T., Sota, T. and Nakamura, S., Appl. Phys. Lett. 69, 4188(1996).10.1063/1.116981Google Scholar
[3] Krueger, J., Kisielowski, C., Klockenbrink, R., Sudhir, G. S., Kim, Y., Rubin, M. and Weber, E. R., MRS Symp. Proc. Vol. 468, 299(1997).10.1557/PROC-468-299Google Scholar
[4] Grudowski, P. A., Eiting, C. J., Park, J., Shelton, B. S., Lambert, D. J. H. and Dupuis, R. D., Appl. Phys. Lett. 71 (11), (1997).10.1063/1.119959Google Scholar
[5] Ho, I. and Stringfellow, G. B., Appl. Phys. Lett. 69 2701, (1996).10.1063/1.117683Google Scholar
[6] El-Masry, N. A., Piner, E. L., Liu, S. X. and Bedair, S. M., Appl. Phys. Lett. 72 (1), (1998).10.1063/1.120639Google Scholar
[7] Ponce, F., Cherns, D., Goetz, W. and Kern, R. S., MRS Symp. Proc. Vol. 482, 453(1998).10.1557/PROC-482-453Google Scholar
[8] Schwander, P., Kisielowski, C., Baumann, F. H., Kim, Y. and Ourmazd, A., Phys. Rev. Lett. 71, (25), 4150 (1993).10.1103/PhysRevLett.71.4150Google Scholar
[9] Kisielowski, C., Schmidt, O. and Wang, J., MRS Symp. Proc. Vol. 482, 369(1998).10.1557/PROC-482-369Google Scholar
[10] Narukawa, Y., Kawakami, Y., Funato, M., Fujita, S., Fujita, S. and Nakamura, S., Appl. Phys. Lett. 70 (8), 981 (1998).10.1063/1.118455Google Scholar
[11] Kisielowski, C., Krfiger, J., Ruvimov, S., Suski, T., IIIAger, J. W., Kones, E., Liliental-Weber, Z., Rubin, M., Weber, E. R., Bremser, M. D. and Davis, R. F., Phys. Rev. B54 (24), 17745 (1996).10.1103/PhysRevB.54.17745Google Scholar
[12] Romano, L. T., Krusor, B. S., Mc Cluskey, M. D., Bour, D. P. and Nauka, K., Appl. Phys. Lett. 73 (13), 1757 (1998).10.1063/1.122272Google Scholar
[13] Kisielowski, C., Liliental-Weber, Z. and Nakamura, S., Jpn. J. Appl. Phys. Vol. 36, 6932(1997).10.1143/JJAP.36.6932Google Scholar