Skip to main content
×
×
Home

Atomic Scale Control of Epitaxial Growth and Interface in Oxide Thin Films for Advanced Oxide Lattice Engineering

  • M. Yoshimoto (a1), T. Maeda (a1), T. Ohnishi (a1), G. H. Lee (a1) and H. Koinuma (a1)...
Abstract

Advanced thin film technology based on laser MBE has enabled us to control the molecular layer-by-layer epitaxial growth and interface structure of oxide thin films in an atomic scale. Molecular layer epitaxy of oxide thin film growth was verified from in situ monitoring of intensity oscillation in reflection high energy electron diffraction (RHEED). Advanced oxide thin film technology was applied to form oxide superlattices for quantum functional oxides and to achieve lattice-matched heteroepitaxy in oxide films on silicon substrate for all epitaxial oxide/silicon hybrid devices. The key factors to develop oxide lattice engineering are discussed with respect to not only in situ monitoring of growth process using RHEED but also atomic regulation of the substrate surface by atomic force microscopy and ion scattering spectroscopy.

Copyright
References
Hide All
1. Bednorz, J. G. and Muller, K. A., Z.Phys. B 64, p. 189 (1986).
2. Asamitsu, A., Moritomo, Y., Tomioka, Y., Arima, T. and Tokura, Y., Nature 373, p. 407 (1995).
3. Koinuma, H. and Yoshimoto, M., Appl. Surf. Sci. 75, p. 308 (1994).
4. Koinuma, H., Nagata, H., Tsukahara, T., Gonda, S. and Yoshimoto, M., Appl.Phys. Lett. 58, p. 2027 (1991).
5. Koinuma, H., Yoshimoto, M. and Nagata, H., “Chemical Processing of Advanced Materials”, ed.by Henchi, L. L. and West, J. K. (John Wiley), Chapt. 29, (1992).
6. Yoshimoto, M., Nagata, H., Tsukahara, T. and Koinuma, H., Jpn. J. Appl. Phys. 29, p. L1199 (1990).
7. Yoshimoto, M., Ohkubo, H., Kanda, N., Koinuma, H., Horiguchi, K., Kumagai, M. and Hirai, K., Appl.Phys.Lett 61, p. 2659 (1992).
8. Koinuma, H., Yoshimoto, M., Nagata, H. and Tsukahara, T., Solid State Commun. 80, p. 9 (1991).
9. Aono, M., Oshima, C., Zaima, S., Otani, S. and Ishizawa, Y., Jpn. J. Appl. Phys. 20, p. L829(1981).
10. Locquet, J. P., Catana, A., Machler, E., Gerber, C., Bednorz, J. G., Appl. Phys.Lett. 64, p. 372 (1994).
11. McKee, R.A., Walker, F. J., Specht, E. D., Jellison, G. E. and Boatner, L. A., Phys. Rev. Lett. 72, p. 2742 (1994).
12. Yoshimoto, M., Maeda, T., Ohnishi, T., Koinuma, H., Ishiyama, O., Shinohara, M., Kubo, M., Miura, R. and Miyamoto, A., Appl.Phys.Lett. 67, p. 2615 (1995).
13. Yoshimoto, M., Maeda, T., Shimozono, K., Koinuma, H., Shinohara, M., Ishiyama, O. and Ohtani, F., Appl.Phys.Lett. 25, p. 3197(1994).
14. Kawasaki, M., Takahashi, K., Maeda, T., Tsuchiya, R., Shinohara, M., Ishiyama, O., Yonezawa, T., Yoshimoto, M. and Koinuma, H., Science 266, p. 1540 (1994).
15. Yoshimoto, M., Ohkubo, H., Kanda, N. and Koinuma, H., Jpn. J. Appl. Phys. 31, p.3664 (1992).
16. Takano, M., Azuma, M., Hiroi, Z. and Bando, Y., Physica C 176, p. 549 (1991).
17. Yoshimoto, M., Nagata, H., Gong, J. P., Ohkubo, H. and Koinuma, H., Physica C 185, p. 2085 (1991).
18. Yoshimoto, M., Nagata, H., Gonda, S., Gong, J. P., Ohkubo, H. and Koinuma, H., Physica C 190, p. 43 (1991).
19. Gong, J. P., Yoshimoto, M., Nagata, H., Gonda, S. and Koinuma, H., “Advances in Superconductivity IV”, ed. by Hayakawa, H. et al. ( Springer-Verlag, Tokyo), p.863 (1991).
20. Yoshimoto, M., Maeda, T., Gonda, S., Shimozono, K., Koinuma, H., Ishiyama, O. and Shinohara, M., Mat. Res. Soc. Symp. Proc. 341, p. 133 (1994).
21. Maeda, T., Yoshimoto, M., Shimozono, K. and Koinuma, H.. Physica C 247, p. 142 (1995).
22. Inoue, T., Yamamoto, Y., Koyama, S., Suzuki, S. and Ueda, Y.,Appl. Phys. Lett. 56, p. 1332 (1990).
23. Yaegashi, S., Kurihara, T., Hoshi, H. and Segawa, H., Jpn. J. Appl. Phys. 33, p. 270 (1990).
24. Chikyow, T., Tye, L., El-Masry, N. A. and Bedair, S. M., Appl. Phys. Lett. 65, p. 1030 (1994).
25. Yoshimoto, M., Shimozono, K., Maeda, T., Ohnishi, T., Kumagai, M., Chikyow, T., Ishiyama, O., Shinohara, M. and Koinuma, H., Jpn. J. Appl. Phys. 34, p. L688 (1995).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed