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Bimorph-type Magnetostrictive Actuator/Sensor Thin Films

Published online by Cambridge University Press:  01 February 2011

Teiko Okazaki ,
Norimasa Okanisi ,
Yuki Miura ,
Munemi Michigami ,
Yasubumi Furuya ,
Ichiro Takeuchi  and
Manfred Wuttig
Teiko Okazaki
Affiliation:
teiko28@cc.hirosaki-u.ac.jp, Hirosaki Univ., Bunkyoucyou 3, Hirosaki, Aomori, 036-8561, Japan, +81-172-39-3553, +81-172-39-3541
Norimasa Okanisi
Affiliation:
Faculty of Science and Technology, Hirosaki University, Hirosaki 036-8561, Japan.
Yuki Miura
Affiliation:
Faculty of Science and Technology, Hirosaki University, Hirosaki 036-8561, Japan.
Munemi Michigami
Affiliation:
Faculty of Science and Technology, Hirosaki University, Hirosaki 036-8561, Japan.
Yasubumi Furuya
Affiliation:
Faculty of Science and Technology, Hirosaki University, Hirosaki 036-8561, Japan.
Ichiro Takeuchi
Affiliation:
Department of Materials Science and Engineering, University of Maryland, College Park, MD 20742-2115, USA.
Manfred Wuttig
Affiliation:
Department of Materials Science and Engineering, University of Maryland, College Park, MD 20742-2115, USA.
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Abstract

Giant magnetostrictive Fe-Pd and Fe-Ga thin films are expected as actuator/ sensor materials with high respective velocity and huge stress created by the magnetostriction. In order to develop magnetostrictive material induced by low magnetic field, we investigated bimorph-type magnetostrictive (positive magnetostriction / substrate / negative magnetostriction) thin films, that is, Fe-Pd(1, 3µm) or Fe-Ga(1, 3µm)/substlate /Ni(1, 3µm) by magnetron sputtering system. The substrate is Al(50µm) or kapton foil (125µm). Displacement of a upper part of these films was measured using an optical lever method. The displacement of the Fe70-Pd30(3µm )/ Al(50µm)/Ni(3µm)film ( length is 20 mm) was 280 μm under low DC magnetic field of 500 Oe and exhibits little hysteresis. These magnetostrictive properties are maintained under low alternating magnetic field. Moreover, the displacement of the film at the resonance frequency exhibits a peak and reached to 1.4 mm. The bimorph-type magnetostrictive thin film is useful for application in micro device as micro-pomp.

Keywords

magnetic propertiessensordevices
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 888: Symposium V – Materials and Devices for Smart Systems II , 2005 , 0888-V04-11
Copyright
Copyright © Materials Research Society 2006

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References

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