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Boron-Interstitial Cluster Kinetics: Extraction of Binding Energies from Dedicated Experiments

Published online by Cambridge University Press:  17 March 2011

Christophe J. Ortiz ,
Peter Pichler ,
Volker Häaublein ,
Giovanni Mannino ,
Silvia Scalese ,
Vittorio Privitera ,
Sandro Solmi  and
Wilfried Lerch
Christophe J. Ortiz
Affiliation:
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie Schottkystrasse 10, 91058 Erlangen, Germany
Peter Pichler
Affiliation:
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie Schottkystrasse 10, 91058 Erlangen, Germany
Volker Häaublein
Affiliation:
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie Schottkystrasse 10, 91058 Erlangen, Germany
Giovanni Mannino
Affiliation:
IMM-CNR, Sezione di Catania, Stradale Primosole, 95121 Catania, Italy
Silvia Scalese
Affiliation:
IMM-CNR, Sezione di Catania, Stradale Primosole, 95121 Catania, Italy
Vittorio Privitera
Affiliation:
IMM-CNR, Sezione di Catania, Stradale Primosole, 95121 Catania, Italy
Sandro Solmi
Affiliation:
IMM-CNR, Sezione di Bologna, Via P. Gobetti 101, 40129 Bologna, Italy
Wilfried Lerch
Affiliation:
Mattson Thermal Products GmbH, Daimlerstrasse 10, 89160 Dornstadt, Germany
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Abstract

A description of the transient diffusion and activation of boron during post-implantation an- nealing steps is one of the most challenging tasks. In industrially relevant situation, it needs to address diffusion at extrinsic concentrations, the agglomeration of self-interstitials, and the formation of boron-interstitial clusters. This article describes the experimental work performed or used to calibrate model parameters as independently as possible. In particular, the experiments used to extract information about the energetics of boron-interstitial clusters are described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 810: Symposium C – Silicon Front-End Junction Formation-Physics and Technology , 2004 , C7.1
Copyright
Copyright © Materials Research Society 2004

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References

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