Skip to main content
×
×
Home

A Calculation Method of the Deposition Profiles in Chemical Vapor Deposition Reactors Using Basis Functions

  • Takahiro Takahashi (a1), Ken Kawamura (a2) and Yoshinori Ema (a3)
Abstract

In this paper, we introduced a novel calculation method to reproduce deposition profiles in various types of Chemical Vapor Deposition (CVD) reactors. Robust and accurate calculations along with reduced computing cost were achieved by the method. Boundary value problems for estimating diffusion-reaction equations by iterations of numerical integrations were changed into problems of finding the linear combinations consisted of a few "basis functions", which are inherent in the reactors. The coefficients of the linear combinations were optimized by Genetic Algorithms (GA). We could demonstrate the validity of the proposed method using various examples of the reaction mechanisms and conditions.

Copyright
References
Hide All
1.Takahashi, T. and Ema, Y. in Combinatorial Methods and Informatics in Materials Science, edited by Fasolka, M. J., Wang, Q., Potyrailo, R.A., Chikyow, T., Schubert, U. S. and Korkin, A., (Mater. Res. Soc. Symp. Proc. 894, Warrendale, PA, 2006) pp. 345350.
2.Takahashi, T., Funatsu, K. and Ema, Y., Meas. Sci. Technol. 16, 278 (2005).
3.Holland, J. H., fiAdaptation in natural and artificial systemsfl, University of Michigan Press (1975).
4.Wehrens, R. and Buydens, L.M.C., Tr. Anal. Chem. 17, 193 (1998).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Keywords

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed