We propose a theoretical study for charging the floating gate composed of Si nanocrystals (NCs), in a non-volatile flash memory. Only a few electrons tunnel from the channel of a metal-oxide-semiconductor transistor into the two-dimensional array of nanocrystals.
Our model is based on the geometrical and physical properties of the device, in order to take the dispersion of the relevant parameters into account: NC radii, inter-NC distances, tunnel oxide and gate oxide thicknesses. The energy subbands of the channel are explicitly included, together with the doping density.
This three-dimensional model of electron tunneling into a NC is numerically solved through a two-dimensional finite element approach, which allows extensive numerical experimentations.
The tunneling times to charge a single NC or the whole NC floating gate are evaluated in a finer detail, and the influence of the dispersion of the relevant parameters is discussed.
Such a study may help the experimentalists to build efficient quantum flash memories.
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