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Chemical Processing of Ferroelectric Niobates Epitaxial Films

Published online by Cambridge University Press:  25 February 2011

Shin-Ichi Hirano ,
Toshinobu Yogo ,
Koichi Kikuta ,
Hisanobu Urahata ,
Yasuhide Isobe ,
Toshiyuki Morishita ,
Koji Ogiso  and
Yasuhiro Ito
Shin-Ichi Hirano
Affiliation:
Department of Applied Chemistry, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464, Japan
Toshinobu Yogo
Affiliation:
Department of Applied Chemistry, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464, Japan
Koichi Kikuta
Affiliation:
Department of Applied Chemistry, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464, Japan
Hisanobu Urahata
Affiliation:
Department of Applied Chemistry, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464, Japan
Yasuhide Isobe
Affiliation:
Department of Applied Chemistry, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464, Japan
Toshiyuki Morishita
Affiliation:
Department of Applied Chemistry, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464, Japan
Koji Ogiso
Affiliation:
Department of Applied Chemistry, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464, Japan
Yasuhiro Ito
Affiliation:
Department of Applied Chemistry, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464, Japan
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Abstract

Recent achievements in the chemical processing of ferroelectric niobates epitaxial films are reported. The molecular level designing of the precursor solution was stressed as well as the control of key processing factors. Examples are presented for LiNbO3/Ti, K(Ta,Nb)O3 and (Sr,Ba)Nb2O6 films from metal alkoxide precursors. Crystalline epitaxial films with stoichiometry could be synthesized through control of the intermediate state of starting molecules in solution. Water vapor stream was found to play an important role in crystallizing gel films to desired phases at relatively lower temperatures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 271: Symposium N – Better Ceramics Through Chemistry V , 1992 , 331
Copyright
Copyright © Materials Research Society 1992

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References

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