Hostname: page-component-76fb5796d-22dnz Total loading time: 0 Render date: 2024-04-25T19:38:33.729Z Has data issue: false hasContentIssue false
  • English
  • Français

Computer Simulation of Cluster Ion Impacts on a Solid Surface

Published online by Cambridge University Press:  10 February 2011

Z. Insepov  and
I. Yamada
Z. Insepov
Affiliation:
Ion Beam Engineering Experimental Lab., Kyoto University, Sakyo, Kyoto 606-01Japan, insepov@kuee.kyoto-u.ac.jp
I. Yamada
Affiliation:
Ion Beam Engineering Experimental Lab., Kyoto University, Sakyo, Kyoto 606-01Japan, insepov@kuee.kyoto-u.ac.jp
Get access

Abstract

The sputtering probabilities for normal and oblique cluster ion impacts were calculated by the use of two-dimensional molecular dynamics (MD) calculations. These simulations have revealed the angular dependence of ejecting surface atoms on the cluster incidence angle. The ejecting flux has a symmetrical form with an essential lateral component in the case of normal cluster incidence. For an oblique cluster indidence we found a sharp asymmetry of sputtering orientation. We obtained that the ejecting flux consists of three components: a) fast flying atoms with the velocities higher than the cluster velocity ν ∼ 2.3ν0, b) approximately self-similar component with ν ≈ ν0, and, finally, c) slowly moving tail with ν ≈ 0.2ν0, where ν0 is the cluster velocity. According to our MD results we developed a new model of surface modification phenomena which consists of the Langevin Dynamics based on the Kardar-Parisi-Zhang equation, combined with a Monte-Carlo procedure for crater formation at normal and oblique cluster impacts. We obtained that for a symmetrical crater shape with a size in the order of 20 Å, a significant smoothing occurs after irradiation by ∼ 103 cluster impacts which has been supported by experiment at dose of ∼ 1014 ion/cm2. The rate of the smoothing process can be significantly accelerated if the lateral sputtering phenemenon is taken into account. Simulation of oblique cluster impact on a surface at a grazing angle of 30° by constructing of asymmetric crater shape gives an opposite result: the surface roughness increases. The latter obtaining qualitatively agrees with the experiment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 408: Symposium P – Materials Theory, Simulations, and Parallel Algorithms , 1995 , 591
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Yamada, I., Matsuo, J., Insepov, Z. and Akizuki, M., Proc. Intern. Conf. IBMM, Canberra, Australia, 1995,(to be published).Google Scholar
2 Gutzmann, A., Klaumunzer, S., and Meier, P., Phys.Rev.Lett. 74, p.2256, (1995).Google Scholar
3 Insepov, Z., Sosnowski, M. and Yamada, I., Trans. Mat. Res. Soc. Jpn. 17, p. 11 (1994).Google Scholar
4 Insepov, Z., Sosnowski, M., Takaoka, G. and Yamada, I., Mat.Res.Soc.Proc., 316, p. 999 (1994).Google Scholar
5 Insepov, Z. and Yamada, I., NIM B 99, p. 248 (1995).Google Scholar
6 Cleveland, C.L. and Landman, U., Science 257, p. 335 (1992).Google Scholar
7 Müller, K.-H., J.Appl.Phys. 61, p. 2516 (1987).Google Scholar
8 Haberland, H., Insepov, Z. and Moseler, M., Phys.Rev.B 51, p. 11061 (1995).Google Scholar
9 Xie, Y.H., Gilmer, G., Roland, C. et al., Phys. Rev. Lett. 73, p.3006 (1994).Google Scholar
10 Kopniczky, J., Reimann, C.T., Hallen, A., Sandqvist, B.U.R., Tengvall, P. and Erlangsson, R., Phys.Rev.B 49, p.625 (1994).Google Scholar
11 Inogamov, N.A., Konstantinov, A.B., Anisimov, S.I. and Zhitenev, S.B., Sov. Phys.JETP 72, p.948 (1991).Google Scholar
12 Zel'dovich, Ya.B., Raiser, Yu.P., Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena, Academic, New York (1967).Google Scholar
13 Kardar, M., Parisi, G. and Zhang, Y., Phys.Rev.Lett. 56, p. 889 (1986).Google Scholar
14 Family, F., J.Phys. A: Math.Gen. 19, p.L441 (1986).Google Scholar
15 Sander, L.M. in Solids far from equilibrium, edited by Godrrche, C., Cambridge Univ.Press, 1992, p. 450–511.Google Scholar
16 Yang, H.-N., Wang, G.-C., and Lu, T.-M., Phys.Rev.B 51, p. 17932 (1995).Google Scholar
17 Abraham, F., Adv.Phys. 35, p.1 (1986).Google Scholar
18 Srivastava, D. and Garrison, B.J., Phys. Rev.B 47, p. 4464 (1993).Google Scholar