The interaction of small energetic clusters of Cu atoms with Cu surfaces has been investigated by molecular dynamics computer simulations. The simulations are fully dynamical and three dimensional; they employ embedded atom method potentials. The simulations described here are an extension of our past work on cluster solid interactions . In this work, the effects of the angle of incidence, energy, size and temperature of the cluster are examined. In addition, soft landings of Cu clusters on Cu are simulated.
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