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Controlled Growth of Amorphous Silicon Nanowires Via a Solid-Liquid-Solid (SLS) Mechanism

Published online by Cambridge University Press:  21 February 2011

H. F. Yan ,
Y. J. Xing ,
Q. L. Hang ,
D. P. Yu ,
J. Xu ,
H. Z. Zhang ,
Z. H. Xi  and
S. Q. Feng
H. F. Yan
Affiliation:
Department of Physics, State Key Laboratory of Mesoscopic Physics, and Electron Microscopy Laboratory, Peking University, Beijing, China
Y. J. Xing
Affiliation:
Department of Electronics, Peking University, Beijing, China
Q. L. Hang
Affiliation:
Department of Physics, State Key Laboratory of Mesoscopic Physics, and Electron Microscopy Laboratory, Peking University, Beijing, China
D. P. Yu
Affiliation:
Department of Physics, State Key Laboratory of Mesoscopic Physics, and Electron Microscopy Laboratory, Peking University, Beijing, China, yudp@pku.edu.cn
J. Xu
Affiliation:
Department of Physics, State Key Laboratory of Mesoscopic Physics, and Electron Microscopy Laboratory, Peking University, Beijing, China
H. Z. Zhang
Affiliation:
Department of Physics, State Key Laboratory of Mesoscopic Physics, and Electron Microscopy Laboratory, Peking University, Beijing, China
Z. H. Xi
Affiliation:
Department of Electronics, Peking University, Beijing, China
S. Q. Feng
Affiliation:
Department of Physics, State Key Laboratory of Mesoscopic Physics, and Electron Microscopy Laboratory, Peking University, Beijing, China
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Abstract

Amorphous silicon nanowires (a-SiNW's) with average diameter around 20 nm were synthesized at about 950° C under an Ar/H2 atmosphere on large area of a (11) Si substrate without supplying any gaseous or liquid Si sources. The Si substrate, deposited with a layer of Ni of about 40 nm thick, served itself as a silicon source for the growth of the a-SiNWs. Different from the well-known vapor-liquid-solid (VLS) for conventional whisker growth, it was found that growth of the a-SiNWs was controlled by a solid-liquid-solid mechanism, which is analogous to the VLS model.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 581: Symposium F – Nanophase & Nanocomposite Materials II , 1999 , 225
Copyright
Copyright © Materials Research Society 2000

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References

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