Skip to main content
×
×
Home

Controlling Area-Selective Atomic Layer Deposition of HfO2 Dielectric by Self-assembled Monolayers

  • Rong Chen (a1), Hyoungsub Kim (a2), Paul C. McIntyre (a2) and Stacey F. Bent (a3)
Abstract

A series of self-assembled molecules have been investigated as deactivating agents for the HfO2 atomic layer deposition (ALD). Three important factors of self-assembled monolayers (SAMs) deactivating efficiency towards ALD--chain length, reactivity and steric effect--have been investigated and discussed as well as the initial blocking mechanism of this process. This investigation shows that in order to achieve satisfactory deactivation, it is crucial to choose high reactivity, low steric effect molecules with certain chain length to form condensed, high hydrophobic organic monolayers.

Copyright
References
Hide All
1. Packan, P., Science 285, 2079 (1999).
2. Wilk, G. D., and Wallace, R. M., Appl. Phys. Lett. 76, 112 (2000).
3. Golzhauser, A., Geyer, W., Stadler, V., Eck, W., Grunze, M., Edinger, K., Weimann, T., and Hinze, P., J. Vac. Sci. Tech. B 18, 3414 (2000).
4. Kang, L., Jeon, Y., Onishi, K., Lee, B. H., Qi, W-J., Nieh, R., Gopalan, S., and Lee, J. C., Technical Digest of VLSI Symposium, P. 44 (2000).
5. Ritala, M., Kukli, K., Rahtu, A., Rälsänen, P. I., Lesklä, M., Sajavaara, T., and Keinonen, J., Science 288, 319 (2000).
6. Chen, R., Kim, H., McIntyre, P. C., and Bent, S. F., Appl. Phys. Lett. accepted.
7. Yanm, M., Koide, Y., Babcock, J. R., Markworth, P. R., Belot, J. A., Marks, T. J., and Chang, R. P. H., Appl. Phys. Lett. 79, 1709 (2001)
8. Chen, R., Mui, C., Musgrave, C. B., Bent, S. F., unpublished date.
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 11 *
Loading metrics...

Abstract views

Total abstract views: 131 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 24th May 2018. This data will be updated every 24 hours.