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Correlation between Chemical Modification and Generated Refractive Index on Ion Implanted PMMA

Published online by Cambridge University Press:  25 February 2011

R. Kallweit ,
U. Roll ,
P. Eichinger ,
H. Strack  and
A. Pöcker
R. Kallweit
Affiliation:
Forschungsinstitut der Deutschen Bundespost TELEKOM, Postfach 10 00 03, D-6100 Darmstadt, FRG
U. Roll
Affiliation:
Perkin-Elmer Physical Electronics Division, Bruckmannring 40, D-8042 Oberschleiβheim, FRG
P. Eichinger
Affiliation:
GeMeTec, Gesellschaft fur Meβtechnik und Technologie mbH, Geretsrieder Straβe 10a, D-8000 München 70, FRG
H. Strack
Affiliation:
Technische Hochschule Darmstadt, Schloβgartenstr. 8, D-6100 Darmstadt, FRG
A. Pöcker
Affiliation:
Forschungsinstitut der Deutschen Bundespost TELEKOM, Postfach 10 00 03, D-6100 Darmstadt, FRG
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Abstract

The optical characteristics of polymethylmetacrylate (PMMA) can be changed selectively with the aid of ion implantation. This can be explained by the manner in which the chain molecules are decomposed by the bombardment. New binding states can be identified by means of XPS on the irradiated surface and traced throughout the implantation depth using dynamic SIMS. In order to avoid chemical reactions, inert gas ions, ranging from He to Xe, have been implanted at energies between 100 keV and 380 keV, and fluences from 1 × 1013 /cm2 to 7 × 1015 /cm2. The results indicate a correlation of the refractive index and the surface layer contraction with surface CH- and COH-groups generation (XPS) and with in-depth damage described by the emission of secondary ions with masses 26 and 42 (SIMS), assigned to (CH2)- and (C2OH2)-.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 268: Symposium K – Materials Modification by Energetic Atoms and Ions , 1992 , 363
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

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