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Crystallization of Sol Gel Pzt on Aluminium and Platinum Metallizations

Published online by Cambridge University Press:  25 February 2011

D. Barrow ,
C.V.R. Vasant Kumar ,
R. Pascual  and
M. Sayer
D. Barrow
Affiliation:
Department of Physics, Queen's University, Kingston, Ont. K7L 3N6, Canada
C.V.R. Vasant Kumar
Affiliation:
Department of Physics, Queen's University, Kingston, Ont. K7L 3N6, Canada
R. Pascual
Affiliation:
Department of Physics, Queen's University, Kingston, Ont. K7L 3N6, Canada
M. Sayer
Affiliation:
Department of Physics, Queen's University, Kingston, Ont. K7L 3N6, Canada
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Abstract

Sol gel prepared PZT films from 0.3 - 1.0 μm in thickness can be crystallised at temperatures down to 520°C on aluminium substrates, but such films are often non-ferroelectric. Comparison with films made on Pt substrates suggests that reduced oxygen content at the interface nucleates a cubic non-ferroelectric PZT phase.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 113
Copyright
Copyright © Materials Research Society 1992

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References

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