Hostname: page-component-848d4c4894-4hhp2 Total loading time: 0 Render date: 2024-04-30T22:51:22.454Z Has data issue: false hasContentIssue false
  • English
  • Français

CW Laser Crystallization of Soi Thermal analysis of the most critical parameters

Published online by Cambridge University Press:  22 February 2011

J.M. Hode ,
J.P. Joly  and
P. Jeuch
J.M. Hode
Affiliation:
Leti - Commissariat à l'Energie Atomique, 85 X - 38041 Grenoble Cedex France
J.P. Joly
Affiliation:
Leti - Commissariat à l'Energie Atomique, 85 X - 38041 Grenoble Cedex France
P. Jeuch
Affiliation:
Leti - Commissariat à l'Energie Atomique, 85 X - 38041 Grenoble Cedex France
Get access

Abstract

We present an overview of the thermal modeling of CW laser induced crystallization of SOI. The dynamical case for a three-layer structure is derived. Effects of the phase change (increase in reflectivity, latent heat) are also treated. Analytical expressions are given and the models are compared to experiment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 23 , 1983 , 513
Copyright
Copyright © Materials Research Society 1984

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

(1)Lax, M., J.A.P. 48, 3919 (1977)Google Scholar
(2)Carslaw, H.S. and Jaeger, J.C., Conduction of Heat in Solids, Clarendon Press 2nd Edition (1959)Google Scholar
(3)Hawkins, W.G. and Biegelsen, D.K., Appl. Phys. Lett 42, 358 (1983)Google Scholar
(4)Burgener, M.L. and Reedy, R.E., J.A.P. 53, 4357 (1982)Google Scholar
(5)Nissim, Y.I., Leitoila, A., Gold, R.B., Gibbons, J.F., J.A.P. 51, 274 (1980)Google Scholar
(6)Touloukian, Y.S., Powell, R.W., Ho, C.Y., Nicolaou, M.C., Thermophysical Properties of Matter, Volume 10, Thermal Diffusivity (Plenum, New York, 1973).Google Scholar