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Defect Generation and Suppression During the Impurity Induced Layer Disordering of Quantum Sized GaAs/GalnP Layers

Published online by Cambridge University Press:  25 February 2011

R. L. Thornton ,
D. P. Bour ,
D. Treat ,
F. A. Ponce ,
J. C. Tramontana  and
F. J. Endicott
R. L. Thornton
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Rd. Palo Alto CA 94304
D. P. Bour
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Rd. Palo Alto CA 94304
D. Treat
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Rd. Palo Alto CA 94304
F. A. Ponce
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Rd. Palo Alto CA 94304
J. C. Tramontana
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Rd. Palo Alto CA 94304
F. J. Endicott
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Rd. Palo Alto CA 94304
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Extract

Impurity induced layer disordering (JILD) has been demonstrated as an extremely powerful technique for the fabrication of optoelectronic devices within the AlGaAs alloy system. The success of this technique in this material system is due in large part to the similarity of the lattice parameters between the two binary constituents in this system, AlAs and GaAs. There are many alloy systems in which it would be highly desirable to exploit the fabrication technique of JILD, but within which the binary alloy constituents are not so well matched in lattice parameter. Perhaps the most extensively explored of such systems are the AlGaInP alloy system lattice matched to a GaAs substrate and the InGaAsP alloy system lattice matched to an InP substrate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 280: Symposium B – Evolution of Surface and Thin Film Microstructure , 1992 , 445
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1) Thornton, R. L., “Planar diffusion based processes for the fabrication of integrated optical and electronic components” SPIE Proceedings Vol. 1582 p 194–205, (1991)Google Scholar
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