Published online by Cambridge University Press: 17 March 2011
In this paper a critical comparison of different kinds of surface metrological methods like atomic force microscopy (AFM), scanning electron microscopy (SEM) and optical interferometric profilometry is made, as well as analytical investigations based on both Hertz and Sneddon theories of pure elastic contact, to qualify the real indenter shape function. The results obtained show the advantages and disadvantages of the respective methods by describing a rounded indenter tip.