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A diminished thermal conductivity of Si/SiGe multilayers established through heating current frequency variation

  • Alex Dooraghi (a1), Prabhakar Bandaru (a2), Dan Krommenhoek (a3) and Norbert Elsner (a4)
Abstract

We report on the measurement of the thermal conductivity of Si/Si0.8Ge0.2 multilayers on Si substrates through a variation of the 3? method. We exploit the frequency dependent variation of the thermal wave, through invoking the thermal penetration depth (TPD), which is inversely proportional to the frequency. Consequently, spectral measurements covering decades of frequency were used to finely probe the substrate and the overlying Si and Si0.8Ge0.2 thin film layers. Both in-phase and out-of phase measurements yielded comparable values of the thermal conductivity in the range of 3-5 W/mK, much lower than the reported bulk values. Our results provide proof of the potential of multilayered media to be used for reduced thermal conductance applications such as thermoelectrics, heat insulation etc.

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