Hostname: page-component-76fb5796d-vvkck Total loading time: 0 Render date: 2024-04-26T13:13:05.553Z Has data issue: false hasContentIssue false
  • English
  • Français

ECR Enhancement of Low Pressure PECVD Diamond Synthesis

Published online by Cambridge University Press:  25 February 2011

Jan-Jue Chang ,
Thomas D. Mantei ,
Rama Vuppuladhadium  and
Howard E. Jackson
Jan-Jue Chang
Affiliation:
University of Cincinnati, Department of Electrical and Computer Engineering, Cincinnati, OH 45221
Thomas D. Mantei
Affiliation:
University of Cincinnati, Department of Electrical and Computer Engineering, Cincinnati, OH 45221
Rama Vuppuladhadium
Affiliation:
University of Cincinnati, Department of Physics, Cincinnati, OH, 45221
Howard E. Jackson
Affiliation:
University of Cincinnati, Department of Physics, Cincinnati, OH, 45221
Get access

Abstract

Diamond films have been synthesized by microwave Plasma Enhanced CVD (PECVD) and permanent magnet induced Electron Cyclotron Resonance (ECR) PECVD of hydrogen diluted methane. The films are characterized by SEM images and Raman spectroscopy. The diamond films grown by ECR-PECVD show clear-cut habits of cubic crystal in SEM images, while the film grown by microwave PECVD are the polycrystalline. A Raman line at 1333cm‒1 and broad band located at ∼1500 cm‒1 were obtained for the films grown by both methods. However, the film grown by microwave PECVD shows a larger broad band which is associated with an sp2-bonded graphitic phase

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 202: Symposium C – Evolution of Thin Film and Surface Microstructure , 1990 , 253
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Matsuo, S. and Kiuchi, M., Jpn. J. Appl. Phys. Vol.22, No.4, L210 (1983).Google Scholar
2. MacDonald, A. D., Microwave Breakdown in Gases, (John Wiley & Son, Inc., New York, 1966), P. 135.Google Scholar
3. Pickrell, D. J., Zhu, W., Badzian, A. R., Messier, R., and Newnham, R. E., Appl. Phys. Lett. 56 (20), 2010 (1990).Google Scholar
4. Mucha, J. A., Flamm, D.L., and Ibbotson, D. E., J. Appl, Phys. 65(9), 3448 (1989).Google Scholar
5. Mitsuda, Y., Kojima, Y., Yoshida, T., and Akashi, K., J. Mater. Sci. 22, 1557 (1987).Google Scholar
6. Kawarada, H., Mar, K. S., and Hiraki, A., Jpn. J. Appl. Phys. Vol. 26, No. 6, L1032 (1987).Google Scholar
7. Suzuki, J. -i, Kawarada, H., Mar, K.S., Wei, J., Yokota, Y., and Hiraki, A, Jpn. J. Appl. Phys. Vol. 28, No. 2, L281, (1989).Google Scholar