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Effects of Deposition Conditions on The Microstructure and Properties of CVD SiC

Published online by Cambridge University Press:  21 February 2011

Eric Minford ,
Robert E. Stevens ,
Vincent L. Magnotta ,
Paul N. Dyer ,
Thomas R. Watkins  and
David J. Green
Eric Minford
Affiliation:
Air Products and Chemicals, Inc., 7201 Hamilton Blvd., Allentown, PA 18195 Air Products and Chemicals, Inc. 1989
Robert E. Stevens
Affiliation:
Air Products and Chemicals, Inc., 7201 Hamilton Blvd., Allentown, PA 18195 Air Products and Chemicals, Inc. 1989
Vincent L. Magnotta
Affiliation:
Air Products and Chemicals, Inc., 7201 Hamilton Blvd., Allentown, PA 18195 Air Products and Chemicals, Inc. 1989
Paul N. Dyer
Affiliation:
Air Products and Chemicals, Inc., 7201 Hamilton Blvd., Allentown, PA 18195 Air Products and Chemicals, Inc. 1989
Thomas R. Watkins
Affiliation:
Dept. of Material Science and Engineering, The Pennsylvania State University, University Park, PA 16802 Air Products and Chemicals, Inc. 1989
David J. Green
Affiliation:
Dept. of Material Science and Engineering, The Pennsylvania State University, University Park, PA 16802 Air Products and Chemicals, Inc. 1989
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Abstract

As part of an ongoing program to develop high performance silicon carbide coatings for graphite, a research study into the effects of deposition conditions on residual stresses was initiated. A series of experiments was conceived and implemented to explore the microstructure and the elastic properties of the coatings and substrates as well as to directly measure the residual stress states. The results of these experiments are analyzed with respect to the effects of deposition temperature on the microstructure and properties of CVD SiC on graphite and how the observed differences affect the residual stresses in the coatings.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 168 , 1989 , 233
Copyright
Copyright © Materials Research Society 1990

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References

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