Skip to main content
×
Home

Effects of Pre-Gate Oxidation Intrinsic Gettering Upon Thin Gate Oxide Integrity In High Carbon Content CZ Si

  • S. Hahn (a1), C. Y. Tung (a2), J. Lee (a2), T. Tuomi (a3) and J. Partanen (a3)...
Abstract
Abstract

Effects of post-well drive intrinsic gettering (PWIG) upon the integrity of thin gate oxide in Cz Si wafers with carbon levels, Cs, ranged from 0.2 - ∼ 4 ppma were investigated. A 10 nm thick gate oxide capacitor was used to study its time-dependent breakdown characteristics and minority carrier lifetime. Our data have shown that PWIG cycles and/or carbon impurity affect both bulk oxygen precipitation and minority carrier lifetime, but not the oxide integrity.

Copyright
References
Hide All
1.Robinson A. l., Science 224, 590 (1984).
2.Singh R., Kuman G. G. and Taylor K. C., in VLSI Science and Technology/1985” edited by Bullis W. M. and Broydo S., ECS PV 85–5 (The Electrochemical Society, Pennington, NJ, 1985) p. 349.
3.Yamabe K., Taniguchi K. and Matsushita Y., in “Defects in Silicon” edited by Bullis W. M. and Kimerling L. C., ECS PV 83–9 (The Electrochemical Society, Pennington, NJ, 1983) p. 629.
4.Lee J., Wong C.- C. D., Tung C. Y., Hahn S., Smith W. L. and Arst M., Appl. Phys. Lett. 51, 54 (1987).
5.Hahn S., Borland J. O. and Wong C. - C. D., in “VSLI Science and Technology/1985” edited by Bullis W. M. and Broydo S., ECS PV 85–5 (The Electrochemical Society, Pennington, NJ, 1985) p. 96.
6.Hahn S., Wong C. - C. D., Ponce F. A. and Rek Z. U., Mat. Res. Soc. Symp. Proc. Vol.59 (1986) p. 353.
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Abstract views

Total abstract views: 29 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 18th November 2017. This data will be updated every 24 hours.