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Electroactive Polymer Based Micro-ElectroMechanical System as Biosensor Platform

  • Zhimin Li (a1), Suiqiong Li (a1) and Z.-Y. Cheng (a1)
Abstract

A micro-electromechanical diaphragm (MEMD) as micro-sensor platform is introduced. The performance of a MEMD is compared with that of a microcantilever (MC). It is theoretically found that the sensitivity of a MEMD is about 50 times higher than that of a MC. The measured resonance frequencies in air proved the validity of the MEMD design. More importantly, the quality merit factor (Q value) of MEMD is higher than that of MC. The damping effect of liquid medium on a MEMD is much smaller than on a MC. It is experimentally demonstrated that the MEMD works well in both air and liquid.

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1. Leonard, P., Hearty, S., Brennan, J., Dunne, L., Quinn, J., Chakraborty, T., and O'Kennedy, R., Enzyme and Microbial Technology 32, 313 (2003).
2. Martin, S. P., Lamb, D. J., Lynch, J. M., and Reddy, S. M., Analytica Chimica Acta 487, 91100 (2003).
3. Tamarin, O., Dejous, C., Rebiere, D., Pistre, J., Comeau, S., Moynet, D., and Bezian, J., Sensors and Actuators B-Chemical 91, 275284 (2003).
4. Thundat, T., Wachter, E. A., Sharp, S. L., and Warmack, R. J., Applied Physics Letters 66, 16951697 (1995).
5. Yi, J. W., Shih, W. Y., and Shih, W. H., Journal of Applied Physics 91, 16801686 (2002).
6. Yi, J. W., Shih, W. Y., Mutharasan, R., and Shih, W. H., Journal of Applied Physics 93, 619625 (2003).
7. Baselt, D. R., Fruhberger, B., Klaassen, E., Cemalovic, S., Britton, C. L., Patel, S. V., Mlsna, T. E., McCorkle, D., and Warmack, B., Sensors and Actuators B-Chemical 88, 120131 (2003).
8. Ilic, B., Czaplewski, D., Craighead, H. G., Neuzil, P., Campagnolo, C., and Batt, C., Applied Physics Letters 77, 450452 (2000).
9. Ilic, B., Czaplewski, D., Zalalutdinov, M., Craighead, H. G., Neuzil, P., Campagnolo, C., and Batt, C., Journal of Vacuum Science & Technology B 19, 28252828 (2001).
10. Thundat, T., Oden, P. I., and Warmack, R. J., Microscale Thermophysical Engineering 1, 185199 (1997).
11. Shih, W. Y., Li, X. P., Gu, H. M., Shih, W. H., and Aksay, I. A., Journal of Applied Physics 89, 14971505 (2001).
12. Blevins, R. D., Formulas for Natural Frequency and Mode Shape (Krieger Publishing Company, Reissue edition, 2001).
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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