Skip to main content Accessibility help

The Energy Release Rate for Decohesion in Thin Multilayered Films on Substrates

  • Ming. Y. He (a1), Guanghai Xu (a1), David R. Clarke (a1), Qing Ma (a2) and H. Fujimoto (a2)...


The strain energy release rates for the converging decohesion crack in a multilayered film on a substrate have been calculated using the finite element method. The results for the energy release rate as a function of the intrinsic stress, the thickness of the superlayer and the modulus ratio will be presented. A simple functional form for the results will be shown. The effects of plasticity of the thin metal layer on the energy release rate have been examined. The results show that the effect of plastic deformation is not significant for the converging decohesion crack. The effects of the line width have also been addressed. The results show that for two-layer films the energy release rate for steady-state decohesion cracks decreases dramatically as B/h decreases, in the range B/h<40, where B is the line width and h is the thickness of the superlayer. For narrow lines the plane strain solutions overestimate the energy release rate. The numerical results are consistent with the experimental observations on lines with different width.



Hide All
[1] Suo, Z. and Hutchinson, J. W., “Interface crack between two elastic layers”. Int. J. Fract. 431–18, 1990.
[2] Janda, M., “On the intrinsic stress in thin chromium films”. Thin Solid Films. 142, 3745, 1986.
[3] Xu, G., Ragan, D. D., Clarke, D. R., He, M. Y.., Ma, Q. and Fujimoto, H., “Measurement of the fracture energy of SiO2/TiN interfaces using the residually-stressed thin-film micro-strip test”, to be published in Interface Engineering for Optimized Properties, Mat. Res. Soc. Symp. Proc, Volume 458, 1997 Materials Research Society.
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed