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Excimer Laser Applications: Polymer Etching and Metal Deposition

Published online by Cambridge University Press:  28 February 2011

Michael Ritz ,
V. Srinivasan ,
S. V. Babu  and
Ramesh C. Patel
Michael Ritz
Affiliation:
Department of Chemical Engineering, Clarkson University, Potsdam, NY 13676
V. Srinivasan
Affiliation:
At IBM Corporation, Austin, TX
S. V. Babu
Affiliation:
Department of Chemical Engineering, Clarkson University, Potsdam, NY 13676
Ramesh C. Patel
Affiliation:
Department of Chemistry, Clarkson University, Potsdam, NY 13676
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Abstract

Excimer laser induced ablative decomposition of polyimide and poly(methylmethacrylate) at high fluences (> 1 J/cm2) is discussed. It is shown that 0.4 μm sized features can be imaged in polyimide using ArF laser pulses. Preliminary results from experiments in which copper particles (<1 μm in size) have been deposited by exposing thin films of a copper formate and glycerol paste to KrF laser radiation are presented.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 75: Symposium B – Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces , 1986 , 433
Copyright
Copyright © Materials Research Society 1987

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