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Experimental Study of the Effect of the Quantum Well Structures on the Thermoelectric Figure of Merit in Si/Si1-xGex System

  • X. Sun (a1), J. Liu (a2), S. B. Cronin (a1), K. L. Wang (a2), G. Chen (a3), T. Koga (a4) and M. S. Dresselhaus (a5)...

In bulk form, Si1-xGex is a promising thermoelectric material for high temperature applications. In this paper, we report results from an experimental study as well as theoretical modeling of the quantum confinement effect on the enhancement of the thermoelectric figure of merit. Si/Si1-xGex, multiple quantum well structures are fabricated using molecular beam epitaxy (MBE) on SOI (Silicon-on-Insulator) substrates in order to eliminate substrate effects, especially on the Seebeck coefficient. A method to eliminate the influence of the buffer layer on the thermoelectric characterization is presented. An enhancement of the thermoelectric figure of merit within the quantum well over the bulk value is observed.

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[1] L. D. Hicks and M. S. Dresselhaus , Phys. Rev. B 47, 12727 (1993).

[3] G.A. Slack and M. A. Hussain , J. Appl. Phys. 70(5), 2694 (1991).

[6] C. Wood , Rep. Prog. Phys. 51, 459 (1988).

[8] G. Chen , J. Heat Transfer 119, 220 (1997).

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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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