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Fabrication and Characterization of Normal and Shear Stresses Sensitive Tactile Sensors by Using Inclined Micro-cantilevers Covered with Elastomer

Published online by Cambridge University Press:  01 February 2011

Masayuki Sohgawa ,
Yu-Ming Huang ,
Minoru Noda ,
Takeshi Kanashima ,
Kaoru Yamashita ,
Masanori Okuyama ,
Masaaki Ikeda  and
Haruo Noma
Masayuki Sohgawa
Affiliation:
sam@semi.ee.es.osaka-u.ac.jp, Osaka University, Graduate School of Engineering Science, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan, +81-6-6850-6332, +81-6-6850-6341
Yu-Ming Huang
Affiliation:
huangs@semi.ee.es.osaka-u.ac.jp, Osaka University, Graduate School of Engineering Science, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan
Minoru Noda
Affiliation:
noda@kit.ac.jp, Kyoto Institute of Technology, Graduate School of Science and Technology, Matsugasaki, Sakyo-ku, Kyoto, 606-8585, Japan
Takeshi Kanashima
Affiliation:
kanashima@ee.es.osaka-u.ac.jp, Osaka University, Graduate School of Engineering Science, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan
Kaoru Yamashita
Affiliation:
yamashita.kaoru@kit.ac.jp, Kyoto Institute of Technology, Graduate School of Science and Technology, Matsugasaki, Sakyo-ku, Kyoto, 606-8585, Japan
Masanori Okuyama
Affiliation:
okuyama@ee.es.osaka-u.ac.jp, Osaka University, Graduate School of Engineering Science, 1-3 Machikaneyama-cho, Toyonaka, Osaka, 560-8531, Japan
Masaaki Ikeda
Affiliation:
masaaki_ikeda2@omron.co.jp, Omron Corporation, Kizugawa, Kyoto, 619-0283, Japan
Haruo Noma
Affiliation:
noma@atr.jp, Advanced Telecommunications Research Institute International, Seika, Souraku, Kyoto, 619-0288, Japan
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Abstract

The tactile sensors for human support robots which can detect both normal stress and shear stress and have human-friendly surface have been proposed. Micro-cantilevers adequately inclined by Cr deflection control layer were fabricated by the surface micromachining on SOI wafer. The cantilevers were covered with the PDMS elastomer for human-friendly surface. When the stress is added to the surface of elastomer, the deformation of cantilevers along with elastomer is detected as piezoresistive layer in the cantilevers. The piezoresistive response of the cantilever is analyzed by FEM calculation. The response of the fabricated tactile sensor to normal stress and shear stress was measured by output from this resistance. The tactile sensor with PDMS elastomer can detect both normal stress and shear stress. On the other hand, it hardly has sensitivity to shear stress of orthogonal direction to the cantilever. It means that the tactile sensor can distinguish the direction of shear stress. The sensitivity of tactile sensor vary widely with cantilever pattern and relation between direction of cantilever and crystallite orientation of Si. It is suggested that the sensitivity of tactile sensor can be improved by using FEM estimation and selective ion implantation.

Keywords

sensormicroelectro-mechanical (MEMS)piezoresponse
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD04-07
Copyright
Copyright © Materials Research Society 2008

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