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Fabrication And Characterization Of Polyimide Waveguides For Optical Interconnection

Published online by Cambridge University Press:  10 February 2011

L. Robitaille ,
C. L. Callender  and
J. P. Noad
L. Robitaille
Affiliation:
Communications Research Centre, 3701 Carling Avenue, P.O. Box 11490, Station H, Ottawa, Ontario, Canada, K2H 8S2
C. L. Callender
Affiliation:
Communications Research Centre, 3701 Carling Avenue, P.O. Box 11490, Station H, Ottawa, Ontario, Canada, K2H 8S2
J. P. Noad
Affiliation:
Communications Research Centre, 3701 Carling Avenue, P.O. Box 11490, Station H, Ottawa, Ontario, Canada, K2H 8S2
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Abstract

This paper reports the fabrication and characterization of polyimide branching waveguides for on-chip optical signal distribution in GaAs-based optoelectronic integrated circuits (OEICs). Low-loss polyimide s-bends and splitters with good splitting ratios and angles considerably larger than similar structures made from inorganic (e.g. LiNbO3) and semiconductor (e.g. GaAs, InP) materials, have been successfully fabricated and tested. The effects of the radius of curvature, splitter angle and cladding materials on the optical losses are discussed.

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References

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