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Fabrication of 3D Feed Horn Shape MEMS Antenna Array using MRPBI (Mirror Reflected Parallel Beam Illuminator) System with an Ultra-Slow-Rotated and Inclined X-Y-Z Stage

Published online by Cambridge University Press:  15 March 2011

Jong-Yeon Park ,
Kun-Tae Kim ,
Sung Moon  and
James Jungho Pak
Jong-Yeon Park
Affiliation:
Dept. of Electrical Engineering, Korea University, Seoul, Republic of, Korea Microsystem Research Center, Korea Institute of Science and Technology P.O.BOX 131, Cheongryang, Seoul, 130-650, Republic of, Korea
Kun-Tae Kim
Affiliation:
Microsystem Research Center, Korea Institute of Science and Technology P.O.BOX 131, Cheongryang, Seoul, 130-650, Republic of, Korea
Sung Moon
Affiliation:
Microsystem Research Center, Korea Institute of Science and Technology P.O.BOX 131, Cheongryang, Seoul, 130-650, Republic of, Korea
James Jungho Pak
Affiliation:
Dept. of Electrical Engineering, Korea University, Seoul, Republic of, Korea
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Abstract

A 3D Feed horn shape MEMS antenna has some attractive features for array application, which can be used to improve microbolometer performance. Since MEMS technology have been faced many difficulties to fabrication of 3D feed horn shape MEMS antenna array itself. The purpose of this paper is to propose a new fabrication method to realize a 3D feed horn shape MEMS antenna array using a MRPBI(Mirror Reflected Parallel Beam Illuminator) system with an ultra-slow-rotated and inclined x-y-z stage. A high-aspect-ratio 300 [.proportional]m sidewalls had been fabricated using SU-8 negative photo resist. It can be demonstrated to feasibility of realize 3D feed horn shape MEMS antenna array fabrication. In order to study the effect of this novel technique, the 3D feed horn shape MEMS antenna array had been simulated with HFSS(High Frequency Structure Simulator) tools and then compared with traditional 3D theoretical antenna models. As a result, it seems possible to use a 3D feed horn shape MEMS antenna at the tera hertz band to improve microbolometer performance and optical MEMS device fabrication.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 687: Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV , 2001 , B5.13
Copyright
Copyright © Materials Research Society 2002

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