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FIB Precise Prototyping and Simulation

Published online by Cambridge University Press:  01 February 2011

Philipp M. Nellen ,
Victor Callegari ,
Juergen Hofmann ,
Elmar Platzgummer  and
Christof Klein
Philipp M. Nellen
Affiliation:
philipp.nellen@empa.ch, EMPA, Electronics/Metrology/Reliability, Ueberlandstrasse 129, Duebendorf, CH-8600, Switzerland, +41 44 823 43 53, +41 44 823 40 54
Victor Callegari
Affiliation:
victor.callegari@empa.ch, EMPA, Electronics/Metrology/Reliability, Ueberlandstrasse 129, Duebendorf, CH-8600, Switzerland
Juergen Hofmann
Affiliation:
juergen.hofmann@empa.ch, EMPA, Electronics/Metrology/Reliability, Ueberlandstrasse 129, Duebendorf, CH-8600, Switzerland
Elmar Platzgummer
Affiliation:
elmar.platzgummer@ims.co.at, IMS Nanofabrication GmbH, Schreygasse 3, Wien, A-1020, Austria
Christof Klein
Affiliation:
christof.klein@ims.co.at, IMS Nanofabrication GmbH, Schreygasse 3, Wien, A-1020, Austria
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Abstract

We present a closed approach towards direct microstructuring and high precision prototyping with focused ion beams (FIB). The approach uses the simulation of the involved physical effects and the modeling of geometry/topography during milling while the ion beam is steered over the surface. Experimental examples are given including the milling of single spots, trenches, rectangles, and Fresnel lenses. Good agreements between simulations and experiments were obtained. The developed procedures can also be applied to other FIB prototyping examples.

Keywords

ion-beam processingmicrostructureion-solid interactions

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