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The Fine Structure of the Mn Distribution in ZnO Layers Deposited by Magnetron Sputtering for Spintronic Application

  • Morad Abouzaid (a1) and Pierre Ruterana (a2)
Abstract
Abstract

In this work, we carry out structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering, using transmission electron microscopy (TEM) and high resolution x-ray diffraction. On top of sapphire (0001) substrates, Mn rich precipitates and an interface reaction layer are observed following the deposition of Zn(Mn)O layers above 500°C. The crystalline quality of ZnO layers deposited by magnetron sputtering is highly improved at 500°C as well as the measured ferromagnetic response.

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  • ISSN: -
  • EISSN: 1946-4274
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