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Finite Element Simulation of Indentation Behavior of thin Films

  • D. T. Madsen (a1), R. J. Giovinazzo (a1) and J. E. Ritter (a1)


Nanoindentation experiments are now widely used to study the elastic and plastic properties of thin films. Simulation of these experiments has been performed using finite element analysis. Results show the large influence that pile-up or sink-in behavior have on hardness calculations. Results also show that a compliant substrate significantly affects the measured hardness of a stiffer coating. The measured hardness of a compliant coating is less effected by a stiffer substrate.



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